Semiconductor light-emitting device

ABSTRACT

A semiconductor light-emitting device includes a substrate; a first semiconductor layer and a second semiconductor layer formed on the substrate, wherein the first semiconductor layer includes a first exposed portion and a second portion; a plurality of first trenches formed on the substrate and including a surface composed by the first exposed portion; a second trench formed on the substrate and including a surface composed by the second exposed portion at a periphery region of the semiconductor light-emitting device, wherein each of the plurality of first trenches is branched from the second trench; and a patterned metal layer formed on the second semiconductor layer and including a first metal region and a second metal region, and portions of the second metal region are formed in the plurality of first trenches and the second trench to electrically connect to the first exposed portion and the second exposed portion.

REFERENCE TO RELATED APPLICATION

This application is a continuation application of U.S. patentapplication Ser. No. 16/520,076, filed on Jul. 23, 2019, which is acontinuation application of U.S. patent application Ser. No. 15/265,069,filed on Sep. 14, 2016, now issued, which is a continuation-in-partapplication of U.S. patent application Ser. No. 14/853,511, filed onSep. 14, 2015, now issued, which is a continuation-in-part applicationof U.S. patent application Ser. No. 14/554,488, filed on Nov. 26, 2014,now issued, and which claims the right of priority based on TWApplication Serial No. 102143409, filed on Nov. 27, 2013; TW ApplicationSerial No. 103119845, filed on Jun. 6, 2014; TW Application Serial No.103124091, filed on Jul. 11, 2014, and the content of which is herebyincorporated by reference in the entirety.

U.S. patent application Ser. No. 15/265,069, filed on Sep. 14, 2016, isa continuation-in-part application of U.S. patent application Ser. No.14/948,733, filed on Nov. 23, 2015, which claims the right of prioritybased on U.S. 62/092,422, filed on Dec. 16, 2014, and the content ofwhich is hereby incorporated by reference in the entirety.

U.S. patent application Ser. No. 15/265,069, filed on Sep. 14, 2016, isa continuation-in-part application of U.S. patent application Ser. No.14/470,396, filed on Aug. 27, 2014, which claims the right of prioritybased on TW Application Serial No. 102130742, filed on Aug. 27, 2013,and the content of which is hereby incorporated by reference in theentirety.

TECHNICAL FIELD

The application relates to a structure of a semiconductor light-emittingdevice, and more particularly, to a semiconductor light-emitting devicecomprising a depression.

BACKGROUND OF THE INVENTION

Light-emitting diode (LED) is widely applied to optical displayapparatus, traffic lights, data storage apparatus, communicationapparatus, lighting apparatus, and medical equipment. As shown in FIG.7, a conventional LED includes an n-type semiconductor layer 1104, anactive layer 1106, and a p-type semiconductor layer 1108 sequentiallyformed on a substrate 1102. Portions of the p-type semiconductor layer1108 and the active layer 1106 are removed to expose a portion of then-type semiconductor layer 1104. A p-type electrode a1 and an n-typeelectrode a2 are formed on the p-type semiconductor layer 1108 and then-type semiconductor layer 1104 respectively. Because the n-typeelectrode a2 requires a sufficient surface for following process such aswire bonding, a substantial portion of the active layer 1106 has to beremoved and the light extraction efficiency is therefore lowered.

Furthermore, the LED described above can be connected with other devicesto form a light-emitting apparatus. FIG. 6 illustrates a diagram of aconventional light-emitting apparatus. As shown in FIG. 6, alight-emitting apparatus 1200 includes a sub-mount 1202 having anelectrical circuit 1204; a solder 1206 formed on the sub-mount 1202 toadhere the LED 1210 to the sub-mount 1202, and electrically connecting asubstrate 1212 of the LED 1210 and the electrical circuit 1204 of thesub-mount 1202; and an electrical connecting structure 1208 electricalconnecting an electrode 1214 of the LED 1210 and the electrical circuit1204 of the sub-mount 1202, wherein the sub-mount 1202 can be a leadframe or a large scaled mounting substrate suitable for the design ofthe electrical circuit of the light-emitting apparatus and improvingheat dissipation.

SUMMARY OF THE APPLICATION

A semiconductor light-emitting device includes a semiconductor stackincluding a first semiconductor layer, a second semiconductor layer, andan active layer formed between the first semiconductor layer and thesecond semiconductor layer, wherein the semiconductor stack includes afirst surface; a plurality of depressions penetrating from the firstsurface, through the first semiconductor layer and the active layer toexpose the second semiconductor layer; a first contact structure formedon the first surface to ohmically contact the first surface; a secondcontact structure formed in the plurality of depressions to ohmicallycontact the second semiconductor layer; a first pad portion formed onthe first surface to electrically connect the first semiconductor layerby the first contact structure; and a second pad portion formed on thefirst surface to electrically connect the second semiconductor layer bythe second contact structure, wherein the first contact structureincludes a plurality of extension electrodes, a portion of the secondcontact structure is formed between the plurality of extensionelectrodes.

A semiconductor light-emitting device includes a semiconductor stackincluding a side, a first surface, and a second surface opposite to thefirst surface, wherein the semiconductor stack includes a conductive viaextending from the first surface to the second surface; a transparentconductive layer formed on the second surface; a first pad portion and asecond pad portion formed on the first surface to electrically connectto the semiconductor stack; and an insulating layer formed between thefirst pad portion and the semiconductor stack, and between the secondpad portion and the semiconductor stack.

A semiconductor light-emitting device includes a semiconductor stackincluding a first semiconductor layer, a second semiconductor layer, andan active layer between the first semiconductor layer and the secondsemiconductor layer, wherein the first semiconductor layer includes aperiphery surface surrounding the active layer; a plurality of viaspenetrating the semiconductor stack to expose the first semiconductorlayer; a patterned metal layer formed on the plurality of vias andcovered the periphery surface of the first semiconductor layer; a firstpad portion formed on the semiconductor stack to electrically connectedto the first semiconductor layer; and a second pad portion formed on thesemiconductor stack to electrically connected to the secondsemiconductor layer.

A semiconductor light-emitting device having an outer periphery includesa semiconductor stack including a first semiconductor layer, a secondsemiconductor layer, and an active layer between the first semiconductorlayer and the second semiconductor layer, wherein the firstsemiconductor layer includes a periphery surface along the outerperiphery of the semiconductor light-emitting device; a plurality ofvias penetrating the semiconductor stack to expose the firstsemiconductor layer; and a patterned metal layer formed on the pluralityof vias and covered the periphery surface of the first semiconductorlayer, wherein the patterned metal layer comprises an area larger thanthat of the active layer.

A semiconductor light-emitting device includes a semiconductor stackincluding a first semiconductor layer, a second semiconductor layer, andan active layer between the first semiconductor layer and the secondsemiconductor layer; a plurality of first trenches penetrating thesecond semiconductor layer and the active layer to expose the firstsemiconductor layer; a second trench penetrating the secondsemiconductor layer and the active layer to expose the firstsemiconductor layer, wherein the second trench is disposed near anoutmost edge of the active layer, and surrounds the active layer and theplurality of first trenches; a patterned metal layer formed on thesecond semiconductor layer and formed in one of the plurality of firsttrenches or the second trench; a first pad portion formed on the secondsemiconductor layer and electrically connecting the second semiconductorlayer; and a second pad portion formed on the second semiconductor layerand electrically connecting the first semiconductor layer.

A semiconductor light-emitting device includes a semiconductor stackincluding a first semiconductor layer, a second semiconductor layer, andan active layer between the first semiconductor layer and the secondsemiconductor layer, wherein the first semiconductor layer includes aperiphery side surface surrounding the active layer wherein theperiphery side surface connects a top surface of the first semiconductorlayer; trenches penetrating the active layer and the secondsemiconductor layer to expose the top surface of the first semiconductorlayer wherein the trenches are disposed near the periphery side surfaceof the first semiconductor layer; and a patterned metal layer formed onthe second semiconductor layer and including a first metal region and asecond metal region, wherein the second metal region formed in one ofthe trenches and covering the periphery side surface of the firstsemiconductor layer.

A semiconductor light-emitting device includes a semiconductor stackincluding a first semiconductor layer, a second semiconductor layer, andan active layer between the first semiconductor layer and the secondsemiconductor layer; a depression penetrating from a surface of thesecond semiconductor layer to expose a surface of the firstsemiconductor layer, wherein the depression comprises a path surroundingan outer periphery of the semiconductor stack, a longitudinal path, anda transversal path, wherein the path, the longitudinal path, and thetransversal path are connected to each other; a first contact structurecomprising a periphery formed on the second semiconductor layer; and asecond contact structure surrounding the periphery of the first contactstructure.

A semiconductor light-emitting device includes a substrate; a firstsemiconductor layer, a second semiconductor layer, and an active layerbetween the first semiconductor layer and the second semiconductor layerformed on the substrate, wherein the a first semiconductor layercomprises a plurality of first portions, the second semiconductor layera plurality of second portions and the active layer comprises aplurality of third portions; a plurality of semiconductor constructionsformed on the substrate, respectively comprising one of the firstportions of the first semiconductor layer, one of the second portions ofthe second semiconductor layer, and one of the third portions of theactive layer; a plurality of first trenches formed on the substrate andexposing a first exposed portion of the first semiconductor layer; asecond trench formed on the substrate and exposing a second exposedportion of the first semiconductor layer at a periphery region of thesemiconductor light-emitting device, wherein the second trench surroundsthe plurality of semiconductor constructions and the plurality of firsttrenches, wherein the first portions of the first semiconductor layer ofthe plurality of semiconductor constructions are connected to each otherthrough the first exposed portion and the second exposed portion of thefirst semiconductor layer in a cross-sectional view of the semiconductorlight-emitting device, and the second portions of the secondsemiconductor layer of the plurality of semiconductor constructions areseparated from each other by one of the plurality of first trenches in atop view of the semiconductor light-emitting device; a patterned metallayer formed on the plurality of semiconductor constructions, whereinthe patterned metal layer comprises a plurality of first metal regionsphysically separated from each other, respectively formed on the secondportions of the second semiconductor layer of the plurality ofsemiconductor constructions, and a second metal region physicallyseparated from the plurality of first metal regions, and whereinportions of the second metal region are formed in the plurality of firsttrenches and the second trench.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a structure diagram of a semiconductor light-emittingdevice I in accordance with a first embodiment of the presentapplication;

FIG. 2 illustrates a top view of the semiconductor light-emitting deviceI in accordance with the first embodiment of the present application;

FIG. 3 illustrates a diagram of a semiconductor light-emitting device IIin accordance with a second embodiment of the present application;

FIG. 4 illustrates a top view of the semiconductor light-emitting deviceII in accordance with the second embodiment of the present application;

FIG. 5 illustrates a structure diagram in accordance with anotherembodiment of the present application;

FIG. 6 illustrates a structure diagram of a conventional light-emittingapparatus;

FIG. 7 illustrates a cross-sectional view of a conventional LED;

FIG. 8 illustrates a top view of a semiconductor light-emitting deviceIII in accordance with another embodiment of the present application;

FIG. 9 illustrates a cross-sectional view along line X-X′ of FIG. 8;

FIG. 10 illustrates a top view of a semiconductor light-emitting deviceIV in accordance with another embodiment of the present application;

FIG. 11 illustrates a cross-sectional view along line A-A′ of FIG. 10;

FIG. 12 illustrates a cross-sectional view along line B-B′ of FIG. 10;

FIGS. 13A, 13B, 14A, 14B, 15A, 15B, 16A, 16B, 17A, 17B, 18A, 18B, 19A,19B, 20A, and 20B illustrate a method of manufacturing a semiconductorlight-emitting device V;

FIG. 21 illustrates a top view of the semiconductor light-emittingdevice V in accordance with an embodiment of the present application;

FIG. 22 illustrates a cross-sectional view of the semiconductorlight-emitting device V along line C-C′ of FIG. 21;

FIG. 23 illustrates a cross-sectional view of the semiconductorlight-emitting device V along line D-D′ of FIG. 21;

FIGS. 24A-24B and 25A, 25B, 26A, 26B, 27A, 27B, 28A, 28B, 28C, 29A, 29B,29C, 30A, 30B, 30C, 31A, 31B and 31C illustrate sequential steps of amethod for fabricating a semiconductor light-emitting device T inaccordance with an embodiment of the present application; and

FIGS. 24C and 24D illustrate top views of trenches in accordance withother embodiments of the present application.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

The present invention is illustrated by way of example and not limitedby the figures of the accompanying drawings in which same referencesindicate similar elements. Many aspects of the disclosure can be betterunderstood with reference to the following drawings. Moreover, in thedrawings same reference numerals designate corresponding elementsthroughout. Wherever possible, the same reference numerals are usedthroughout the drawings to refer to the same or similar elements of anembodiment.

FIG. 1 illustrates a structure diagram of a semiconductor light-emittingdevice I in accordance with a first embodiment of the presentapplication. The semiconductor light-emitting device I is a flip chiptype light-emitting diode device including a semiconductor stack havingdepressions. The semiconductor light-emitting device I includes asemiconductor stack 1 including a first surface 13 and a second surface14 opposite to the first surface 13. The semiconductor stack 1 includesa first semiconductor layer 11, a second semiconductor layer 12, and anactive layer 10 formed between the first semiconductor layer 11 and thesecond semiconductor layer 12, wherein the first surface 13 is thesurface of the first semiconductor layer 11 and the second surface 14 isthe surface of the second semiconductor layer 12. The firstsemiconductor layer 11 and the second semiconductor layer 12 comprisedifferent conductivity types, electricity, polarity, or dopant elementsfor providing electrons and holes. The active layer 10 is formed betweenthe first semiconductor layer 11 and the second semiconductor layer 12.The active layer 10 converts electrical energy to optical energy. Thedominant wavelength of the light is adjusted by changing physical andchemical compositions of one or more layers in the semiconductor stack1. The material of the semiconductor stack 1 includes aluminum galliumindium phosphide (AlGaInP), aluminum gallium indium nitride (AlGaInN),or zinc oxide (ZnO). The active layer 10 includes single heterostructure(SH), double heterostructure (DH), double-side double heterostructure(DDH), or multi-quantum well (MQW) structure. Specifically, the activelayer 10 includes i-type, p-type, or n-type semiconductor. The activelayer 10 emits light when an electrical current passes through thesemiconductor stack 1. When the active layer 10 includes AlGaInP basedmaterial, the active layer 10 emits amber series light, such as redlight, orange light, or yellow light; when the active layer 10 includesAlGaInN based material, the active layer 10 emits blue or green light.The present embodiment illustrates the semiconductor stack 1 withaluminum gallium indium phosphide (AlGaInP) based material.

A first contact structure 3 is formed on the first surface 13 toohmically contact the first semiconductor layer 11, and a first padportion 43 is formed on a portion of the first contact structure 3. Whenthe electrical current is injected into the first pad portion 43, theelectrical current is conducted to an area of the first semiconductorlayer 11 not covered by the first pad portion 43 through the firstcontact structure 3 for improving the current spreading. FIG. 2illustrates a top view of the semiconductor light-emitting device I. Thefirst pad portion 43 is formed on a side of the semiconductorlight-emitting device I, and the shape of the first contact structure 3includes a plurality of finger electrodes extending from an area underthe first pad portion 43 to another side opposite to that of the firstpad portion 43 for spreading the current to all areas of thesemiconductor stack 1. The material of the first pad portion 43 includestitanium (Ti), platinum (Pt), nickel (Ni), tin (Sn), gold (Au), or analloy thereof; the material of the first contact structure 3 comprisesgold (Au), germanium (Ge), beryllium (Be), or an alloy thereof.

A plurality of depressions 15 is formed in the semiconductor stack 1,and each depression 15 penetrates from the first surface 13 of the firstsemiconductor layer 11, through the first semiconductor layer 11 and theactive layer 10, and into the second semiconductor layer 12 to expose aplurality of surfaces 121 on the second semiconductor layer 12. Aplurality of second contact structures 2 is formed in the plurality ofdepressions 15 to ohmically contact the plurality of surfaces 121. Asmallest distance between the second contact structure 2 and the firstcontact structure 3 ranges between 10 μm and 100 μm. A length of thesecond contact structure 2 is longer than a depth of the depression 15,thus the second contact structure 2 protrudes the first surface 13. Aninsulating layer 6 is formed between the second contact structure 2 anda sidewall 151 of the depression 15. The insulating layer 6 separatesthe second contact structure 2 and the sidewall 151 to avoid of thesecond contact structure 2 directly contacting the active layer 10 andthe first semiconductor layer 11. In the embodiment, the plurality ofdepressions 15 is a plurality of vias. As shown in the top view of thefirst embodiment in FIG. 2, the plurality of depressions 15 is formedbetween a plurality of extension electrodes 33 of the first contactstructure 3, and is arranged along an extending direction of theextension electrode 33. The second contact structure 2 includes aplurality of conductive rods 22 disposed in the plurality of depressions15 respectively. A smallest distance between the conductive rod 22 andthe extension electrode 33 ranges between 10 μm and 100 μm. Theinsulating layer 6 not only fills a space between the second contactstructure 2 and the sidewall 151, but also covers a portion of the firstcontact structure 3 which is formed on the first surface 13. Theinsulating layer 6 covers a portion of the second contact structure 2protruding from the first surface 13 and exposes a contact surface 21 ofthe second contact structure 2. The insulating layer 6 and the contactsurface 21 of the second contact structure 2 form a flat surface 61. Thematerial of the second contact structure 2 includes germanium (Ge),beryllium (Be), gold (Au), or an alloy thereof to ohmically contact thesecond semiconductor layer 12. The insulating layer 6 permits the lightemitted from the active layer 10 to transmit thereof. In anotherembodiment, the first surface 13 can be a rough surface which reducesthe total internal reflection of the light passing through theinsulating layer 6 and the first surface 13. The material of theinsulating layer 6 includes organic materials, such as benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy resin, acrylic resin, cyclicolefin polymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymers; or inorganic materials, such as silicone, glass; dielectricmaterials, such as aluminum oxide (Al₂O₃), silicon nitride (SiN_(x)),silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesium fluoride(MgF₂).

A reflective layer 52 covers all of the surface 61 and contacts all ofthe contact surfaces 21 of the second contact structure 2. The materialof the reflective layer 52 includes metal material with highreflectivity, such as silver (Ag), gold (Au), aluminum (Al), titanium(Ti), chromium (Cr), copper (Cu), nickel (Ni), platinum (Pt), or analloy thereof.

A second pad portion 53 covers the reflective layer 52 to connect thereflective layer 52. The second pad portion 53 conducts the electricalcurrent from the external power source into the semiconductorlight-emitting device I, wherein the electrical current sequentiallyflows through the reflective layer 52, the second contact structure 2and the semiconductor stack 1, and flows out from the first contactstructure 3 and the first pad portion 43. The material of the second padportion 53 includes titanium (Ti), platinum (Pt), nickel (Ni), tin (Sn),gold (Au), or an alloy thereof. A space 7 is formed between the firstpad portion 43 and the second pad portion 53 to separate the first padportion 43 and the second pad portion 53. A width of the space 7 rangesbetween 70 μm and 250 μm. When the semiconductor light-emitting device Iincludes a square shape with a side of 12 mil, the area of the first padportion 43 and the second pad portion 53 is 15%˜80% of the area of thesemiconductor light-emitting device I; when the semiconductorlight-emitting device I includes a square shape with a side of 28 mil,the area of the first pad portion 43 and the second pad portion 53 is60%˜92% of the area of the semiconductor light-emitting device I; whenthe semiconductor light-emitting device I includes a square shape with aside of 40 mil, the area of the first pad portion 43 and the second padportion 53 is 75%˜95% of the area of the semiconductor light-emittingdevice I.

An adhesive layer 9 covers the second surface 14, and the substrate 8 isbonded to the second surface 14 by the adhesive layer 9. The lightemitted from the active layer 10 can transmit through the adhesive layer9 and the substrate 8. In another embodiment, the second surface 14 is arough surface which reduces the total internal reflection of the lighttransmitting through the adhesive layer 9 and the second surface 14. Therefractive index of the adhesive layer 9 preferably ranges between therefractive index of the second semiconductor layer 12 and the refractiveindex of the substrate 8, and the refractive index of the substrate 8 ispreferably smaller than the refractive index of the adhesive layer 9. Inthe embodiment, the refractive index of the adhesive layer 9 rangesbetween 1.77 and 3.3, and the refractive index of the substrate 8 rangesbetween 1 and 1.77. The material of the adhesive layer 9 includesmaterial which is transparent with respect to the light emitted from theactive layer 10, including organic materials, such as Sub,benzocyclobutene (BCB), perfluorocyclobutane (PFCB), epoxy, acrylicresin, cyclic olefin polymer (COC), polymethyl methacrylate (PMMA),polyethylene terephthalate (PET), polycarbonate (PC), polyetherimide, orfluorocarbon polymer; or inorganic materials, such as silicone, glass;dielectric material, such as aluminum oxide (Al₂O₃), silicon nitride(SiNx), silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesiumfluoride (MgF₂). A material of the substrate 8 includes transparentmaterial which is transparent with respect to the light emitted from theactive layer 10, such as gallium arsenide (GaAs), gallium phosphide(GaP), gallium nitride (GaN), sapphire, diamond, glass, quartz, acrylic,zinc oxide (ZnO), or aluminum nitride (AlN).

FIG. 3 illustrates a diagram of a semiconductor light-emitting device IIin accordance with a second embodiment of the present application. Thesemiconductor light-emitting device II is a flip chip typelight-emitting diode device including a semiconductor stack 1 havingdepressions. The semiconductor light-emitting device II includes thesemiconductor stack 1 having a first surface 13 and a second surface 14opposite to the first surface 13. The semiconductor stack 1 includes afirst semiconductor layer 11, a second semiconductor layer 12, and anactive layer 10 formed between the first semiconductor layer 11 and thesecond semiconductor layer 12, wherein the first surface 13 is thesurface of the first semiconductor layer 11 and the second surface 14 isthe surface of the second semiconductor layer 12. The firstsemiconductor layer 11 and the second semiconductor layer 12 includesdifferent conductivity types, electricity, polarity, or dopant elementsfor providing electrons and holes. The active layer 10 is formed betweenthe first semiconductor layer 11 and the second semiconductor layer 12.The active layer 10 converts electrical energy to optical energy. Thedominant wavelength of the light is adjusted by changing physical andchemical compositions of one or more layers in the semiconductor stack1. The material of the semiconductor stack 1 includes aluminum galliumindium phosphide (AlGaInP), aluminum gallium indium nitride (AlGaInN),or zinc oxide (ZnO). The active layer 10 includes single heterostructure(SH), double heterostructure (DH), double-side double heterostructure(DDH), or multi-quantum well (MQW) structure. Specifically, the activelayer 10 includes i-type, p-type, or n-type semiconductor. The activelayer 10 emits light when an electrical current passes through thesemiconductor stack 1. When the active layer 10 includes AlGaInP basedmaterial, the active layer 10 emits amber series light, such as redlight, orange light, or yellow light; when the active layer 10 includesAlGaInN based material, the active layer 10 emits blue or green light.The present embodiment illustrates the semiconductor stack 1 withaluminum gallium indium phosphide (AlGaInP) based material.

In the embodiment, the depression 15 is formed in the semiconductorstack 1, penetrates from the first surface 13 of the first semiconductorlayer 11, through the first semiconductor layer 11, the active layer 10,and into the second semiconductor layer 12 to expose a plurality ofsurfaces 121 on the second semiconductor layer 12. As shown in the topview of the semiconductor light-emitting device II of FIG. 4 inaccordance with the second embodiment of the present application, thedepression 15 includes a path 15A formed on a side 16 of thesemiconductor stack 1, a longitudinal path 15B, or a transversal path15C, wherein the path 15A, the path 15B, and the path 15C are connectedto each other. In a top view, a shape of the path 15B and thetransversal path 15C includes a cross. The second contact structure 2 isformed in the depression 15, continuously along the path 15A, the path15B, and the path 15C to ohmically contact the surface 121 for uniformlyspreading the electrical current on the second semiconductor layer 12.An insulating layer 62 conformably covers the second contact structure2, the path 15B, the path 15C, and the first surface 13 adjacent to thepath 15B and the path 15C, but not covers the first contact structure 3.The insulating layer 62 separates the second contact structure 2 and thesidewall 151 to avoid of the second contact structure 2 directlycontacting the active layer 10 and the first semiconductor layer 11. Thematerial of the second contact structure 2 includes germanium (Ge),beryllium (Be), gold (Au), or an alloy thereof to ohmically contact thesecond semiconductor layer 12. The insulating layer 62 permits the lightemitted from the active layer 10 to transmit thereof. The material ofthe insulating layer 62 includes organic materials, such asbenzocyclobutene (BCB), perfluorocyclobutane (PFCB), epoxy, acrylicresin, cyclic olefin polymer (COC), polymethyl methacrylate (PMMA),polyethylene terephthalate (PET), polycarbonate (PC), polyetherimide, orfluorocarbon polymer; or inorganic materials, such as silicone, glass;dielectric materials, such as aluminum oxide (Al₂O₃), silicon nitride(SiN_(x)), silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesiumfluoride (MgF₂).

In the embodiment, the first surface 13 can be a rough surface whichreduces the total internal reflection of the light passing through thefirst surface 13 and the insulating layer 62. The method of forming therough surface includes wet etch, such as soaking in acidic or alkalineetching solution, or dry etching, such as inductively coupled plasma(ICP). The contact structure 3 is formed on the first surface 13 toohmically contact the first semiconductor layer 11. As shown in FIG. 4,the shape of the first contact structure 3 includes a pattern, such aspoint, line, circle, ellipse, square, or rectangular. In the embodiment,the first contact structure 3 is distributed on the first semiconductorlayer 11 in a shape of a plurality of squares including a big square 31and a small square 32, which are independent to each other and notdirectly contact with each other. The periphery of each square issurrounded by the second contact structure 2. The material of the firstcontact structure 3 includes gold (Au), germanium (Ge), beryllium (Be),or an alloy thereof to ohmically contact the first semiconductor layer11.

A transparent conductive layer 55 conformably covers the first surface13, the first contact structure 3, and the insulating layer 62. Areflective layer 52 conformably covers the transparent conductive layer55. The transparent conductive layer 55 includes transparent conductivematerial and a thickness ranging between 1 μm and 10 μm for adheringwith the reflective layer 52 and avoid of the reflective layer 52 frompeeling. The material of the reflective layer 52 includes metal materialwith high reflectivity, such as silver (Ag), gold (Au), aluminum (Al),titanium (Ti), chromium (Cr), copper (Cu), nickel (Ni), platinum (Pt),or an alloy thereof, to reflect the light emitted from the active layer10 toward the second surface 14.

A patterned insulating layer 63 conformably covers the reflective layer52, forms along the periphery of the reflective layer 52 to cover thesidewall 151 of the path 15A. The insulating layer 63 includes a via 631exposing the reflective layer 52. The insulating layer 63 includesnon-conductive material organic materials, such as Sub, benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer; or inorganic materials, such as silicone, glass; dielectricmaterials, such as aluminum oxide (Al₂O₃), silicon nitride (SiN_(x)),silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesium fluoride(MgF₂).

A first pad portion 43 and a second pad portion 53 are formed on theinsulating layer 63. A bonding surface 431 of the first pad portion 43and a bonding surface 532 of the second pad portion 53 are on the sameplanar surface by forming the insulating layer 63 under the first padportion 43 and the second pad portion 53. A space 7 is formed betweenthe first pad portion 43 and the second pad portion 53 to separate thefirst pad portion 43 and the second pad portion 53. In the embodiment, awidth of the space 7 ranges between 70 μm and 250 μm. When thesemiconductor light-emitting device includes a square shape with a sideof 12 mil, the area of the first pad portion 43 and the second padportion 53 is 15%˜80% of the area of the semiconductor light-emittingdevice; when the semiconductor light-emitting device includes a squareshape with a side of 28 mil, the area of the first pad portion 43 andthe second pad portion 53 is 60%˜92% of the area of the semiconductorlight-emitting device; when the semiconductor light-emitting deviceincludes a square shape with a side of 40 mil, the area of the first padportion 43 and the second pad portion 53 is 75%˜95% of the area of thesemiconductor light-emitting device. The first pad portion 43 directlycontacts the reflective layer 52 through the via 631, the second padportion 53 is separated from the reflective layer 52 by the insulatinglayer 63. The second pad portion 53 includes a connecting part 531covering the path 15A to directly connect the second contact structure2. The connecting part 531 covers the insulating layer 63 of thesidewall 151 of the path 15A to avoid of directly contacting the activelayer 10 and the first semiconductor layer 11. The first pad portion 43and the second pad portion 53 conduct the electrical current from theexternal power source into the semiconductor light-emitting device IIfor emitting light. The electrical current flows into the first padportion 43, through the hole 631, the reflective layer 52, into thesemiconductor stack 1 by way of the areas having lower contactresistance which is between the first contact structure 3 and the firstsemiconductor layer 11, the electrical current sequentially flowsthrough the first semiconductor layer 11, the active layer 10, and thesecond semiconductor layer 12, and flows out the second pad portion 53by the second contact structure 2. The material of the first pad portion43 and the second pad portion 53 include titanium (Ti), platinum (Pt),nickel (Ni), tin (Sn), gold (Au), or an alloy thereof. In anotherembodiment, the insulating layer 63 is disposed only between the secondpad portion 53 and the reflective layer 52, and the first pad portion 43directly contacts the reflective layer 52 for increasing the heatdissipation efficiency. The first pad portion 43 can be furtherprocessed through evaporation for forming the bonding surface 431 of thefirst pad portion 43 and the bonding surface 532 of the second padportion 53 on the same planar surface.

An adhesive layer 9 covers the second surface 14, and the substrate 8 isbonded to the second surface 14 by the adhesive layer 9. The lightemitted from the active layer 10 can transmit through the adhesive layer9 and the substrate 8. The second surface 14 can form a rough surfacewhich reduces the total internal reflection and increases the lightextraction efficiency when the light transmits through the adhesivelayer 9 and the second surface 14. The method of forming the roughsurface includes wet etch, such as soaking in acidic or alkaline etchingsolution, or dry etching, such as ICP. The refractive index of theadhesive layer 9 preferably ranges between the refractive index of thesecond semiconductor layer 12 and the refractive index of the substrate8, and the refractive index of the substrate 8 is preferably smallerthan the refractive index of the adhesive layer 9. In the presentembodiment, the refractive index of the adhesive layer 9 ranges between1.77 and 3.3, and the refractive index of the substrate ranges between 1and 1.77. The material of the adhesive layer 9 includes material whichis transparent with respect to the light emitted from the active layer10, including organic materials, such as Sub, benzocyclobutene (BCB),perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer; or inorganic materials, such as silicone, glass; dielectricmaterials, such as aluminum oxide (Al₂O₃), silicon nitride (SiNx),silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesium fluoride(MgF₂). A material of the substrate 8 includes transparent materialwhich is transparent with respect to the light emitted from the activelayer 10, such as gallium arsenide (GaAs), gallium phosphide (GaP),gallium nitride (GaN), sapphire, diamond, glass, quartz, acryl, zincoxide (ZnO), or aluminum nitride (AlN).

FIG. 8 illustrates a top view of a semiconductor light-emitting deviceIII in accordance with another embodiment of the present application.FIG. 9 illustrates a cross-sectional view along line X-X′ of FIG. 8. Thesemiconductor light-emitting device III is a flip chip typelight-emitting diode device. As shown in FIG. 9, the semiconductorlight-emitting device III includes a semiconductor stack 1 including afirst surface S3 and a second surface S2 opposite to the first surfaceS3. The semiconductor stack 1 includes a first semiconductor layer 11, asecond semiconductor layer 12, and an active layer 10 formed between thefirst semiconductor layer 11 and the second semiconductor layer 12,wherein the first surface 13 is the surface of the first semiconductorlayer 11 and the second surface 14 is the surface of the secondsemiconductor layer 12. The first semiconductor layer 11 and the secondsemiconductor layer 12, such as cladding layers or confinement layers,comprise different conductivity types, electricity, polarity, or dopantelements to provide electrons and holes. The active layer 10 is formedbetween the first semiconductor layer 11 and the second semiconductorlayer 12 so the electrons and the holes combine in the active layer 10under an electrical current to convert electrical energy to opticalenergy for emitting a light. The dominant wavelength of the light isadjusted by changing physical and chemical compositions of one or morelayers in the semiconductor stack 1. The material of the semiconductorstack 1 includes group III-V semiconductor materials, such asAl_(x)In_(y)Ga_((1-x-y))N or Al_(x)In_(y)Ga_((1-x-y))P, wherein 0≤x,y≤1; (x+y)≤1. In accordance with the material of the active layer 10,the semiconductor stack 1 can emit a red light with a dominantwavelength between 610 nm and 650 nm, a green light with a dominantwavelength between 530 nm and 570 nm, or a blue light with a dominantwavelength between 450 nm and 490 nm. The active layer 10 includessingle heterostructure (SH), double heterostructure (DH), double-sidedouble heterostructure (DDH), or multi-quantum well (MQW) structure. Thematerial of the active layer 10 includes i-type, p-type, or n-typesemiconductor.

A plurality of contact structures 30 is uniformly distributed on thefirst surface S3 of the semiconductor stack 1 to ohmically contact thefirst semiconductor layer 11 for spreading the current on the firstsemiconductor layer 11. For example, a metal layer can be deposited onthe first surface S3 of the semiconductor stack 1 and patterned to forma plurality of contact structures 30. The material of the contactstructure 30 includes gold (Au), germanium (Ge), beryllium (Be), or analloy thereof. The shape of the contact structure 30 includes circle orpolygon. As shown in the top view of the semiconductor light-emittingdevice III of FIG. 8, the shape of the contact structure 30 is circleand a plurality of contact structures 30 is arranged into a plurality ofrows on the semiconductor stack 1, wherein the plurality of contactstructures 30 on adjacent two rows are staggered.

A first reflective layer 331 including low refractive index materials isformed on the first surface S3 of the semiconductor stack 1, and/orbetween the plurality of contact structures 30. Furthermore, theplurality of contact structures 30 can be formed between the firstreflective layer 331 and the semiconductor stack 1. Because therefractive index of the group III-V semiconductor materials is between 2and 4, a material having a refractive index lower than that of the groupIII-V semiconductor materials is chosen to totally reflect the lightemitted from the active layer 10 between the first surface S3 and thefirst reflective layer 331 for increasing the light extractionefficiency of the semiconductor light-emitting device III. The lowrefractive index material includes oxide, fluoride, or metal oxide. Thefluoride includes magnesium fluoride (MgF₂) or calcium fluoride (CaF₂).Metal oxide includes titanium oxide (TiO₂), tantalum oxide (Ta₂O₅),tellurium dioxide (TeO₂), yttrium oxide (Y₂O₃), hafnium oxide (HfO₂),aluminum oxide (Al₂O₃), indium zinc oxide (IZO), or indium tin oxide(ITO).

In order to increase the light extraction efficiency of thesemiconductor light-emitting device IQ, the first surface S3 of thesemiconductor stack 1 can be a rough surface, and/or a second reflectivelayer 5 is formed on the first surface S3. The method for forming therough surface includes etching, polishing, or printing. The etchingmethod includes wet etch, such as soaking in acidic or alkaline etchingsolution, or dry etching, such as ICP. The structure of the secondreflective layer 5 can be one or more layers. The material of the secondreflective layer 5 includes metal material with high reflectivity, suchas silver (Ag), gold (Au), aluminum (Al), titanium (Ti), chromium (Cr),copper (Cu), nickel (Ni), platinum (Pt), or an alloy thereof. The highreflectivity is 80% or above with respect to the dominant wavelength ofthe light emitted from the semiconductor light-emitting device III. Thesecond reflective layer 5 is more away from the semiconductor stack 1than the first reflective layer 331 so the light not reflected by thefirst reflective layer 331 can be further reflected by the secondreflective layer 5. As shown in FIG. 9, the second reflective layer 5contacts with the first reflective layer 331 and/or the plurality ofcontact structures 30 for forming electrical connection when electricalcurrent is injected.

A transparent conductive layer 19 is formed on the second surface S2 ofthe semiconductor stack 1 and electrically connected to thesemiconductor stack 1 when electrical current is injected. The materialof the transparent conductive layer 19 includes transparent materialwhich is transparent to the light emitted from the active layer 10. Inorder to reduce the possibility of total internal reflection of thelight emitted from the active layer 10 on the second surface S2, thetransparent conductive layer 19 includes non-group III-V semiconductormaterials, wherein the refractive index of the material of thetransparent conductive layer 19 is lower than that of the semiconductorstack 1, and the structure of the transparent conductive layer 19 can beone or more layers, for example, including a first transparentconductive layer 191 and a second transparent conductive layer 192.Specifically, when the transparent conductive layer 19 is a structure ofmulti layers, the first transparent conductive layer 191, which is moreaway from the semiconductor stack 1 than other transparent conductivelayers, includes material for improving lateral current spreading, forexample, indium zinc oxide (IZO). The second transparent conductivelayer 192, which is closer to the semiconductor stack 1 than othertransparent conductive layers, includes material for forming ohmicallycontact with the second semiconductor layer 12, for example, indium tinoxide (ITO).

In order to increase the light extraction efficiency of thesemiconductor light-emitting device III, the second surface S2 of thesemiconductor stack 1 can be a rough surface to reduce total internalreflection. The method for forming the rough surface includes etching,polishing, or printing. The etching method includes wet etch, such assoaking in acidic or alkaline etching solution, or dry etching, such asICP.

In other embodiments of the present application, a substrate 8 can beoptionally formed on the semiconductor stack 1. The substrate 8 can bebonded to the second surface S2 of the semiconductor stack 1 by thetransparent conductive layer 19. The substrate 8 includes transparentmaterial which is transparent to the light emitted from the active layer10, such as gallium arsenide (GaAs), gallium phosphide (GaP), galliumnitride (GaN), sapphire, diamond, glass, quartz, acrylic, zinc oxide(ZnO), or aluminum nitride (AlN). In order to reduce the total internalreflection of the light emitted from the active layer 10 on theinterface S1 between the substrate 8 and the transparent conductivelayer 19, the refractive index of the material of the substrate 8 issmaller than that of the transparent conductive layer 19, and therefractive index of the transparent conductive layer 19 is between therefractive index of the substrate 8 and the refractive index of thesemiconductor stack 1. Concerning the process yield, a side e1 of thesubstrate 8 can be planar with a side e2 of the semiconductor stack 1,or the side e1 of the substrate 8 protrudes the side e2 of thesemiconductor stack 1, as shown in FIG. 9.

In an embodiment of the present application, the semiconductor stack 1includes a conductive via 35 extending from the first surface S3 to thesecond surface S2. As shown in FIG. 8, the semiconductor light-emittingdevice III includes a plurality of conductive vias 35, wherein theplurality of conductive vias 35 is separated from each other from a topview of the semiconductor light-emitting device III, and each of theplurality of conductive vias 35 is surrounded by the semiconductor stack1. As shown in FIG. 9, the plurality of conductive vias 35 penetratesfrom the first surface S3 of the semiconductor stack 1, through thesemiconductor stack 1 by removing a portion of the semiconductor stack1. In a variant of the embodiment, an end 351 of the conductive via 35exposes on the second surface S2 of the semiconductor stack 1 as shownin FIG. 9. In another variant of the embodiment, the end 351 of theconductive via 35 extends a depth into the transparent conductive layer19 (not shown). The forming position of the conductive via 35 isstaggered with the forming position of the contact structure 30, asshown in FIG. 8, the plurality of contact structures 30 surrounds theconductive via 35 and is disposed on the periphery of the conductive via35.

A first insulating layer 361 can be deposited on the semiconductor stack1 and in the conductive via 35 through evaporation. A portion of thefirst insulating layer 361 covering the end 351 of the conductive via 35and a portion of the first insulating layer 361 covering the secondreflective layer 5 can be removed through pattering to form a firstopening W1 on the end 351 of the conductive via 35 and expose thetransparent conductive layer 19, and to form a second opening W2 on thesecond reflective layer 5 and expose the second reflective layer 5. Thematerial of the first insulating layer 361 includes non-conductivematerial including organic materials, such as Sub, benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer; or inorganic materials, such as silicone, glass; dielectricmaterials, such as aluminum oxide (Al₂O₃), silicon nitride (SiN_(x)),silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesium fluoride(MgF₂).

As shown in FIG. 8 and FIG. 9, a conductive material, such as metal, isdeposited in the conductive via 35 through evaporation or sputtering tocover the first opening W1 and cover a portion of the first insulatinglayer 361 to form a connecting layer 4. The connecting layer 4 includesa first connecting layer 41 formed in the conductive via 35 and a secondconnecting layer 42 formed on the first insulating layer 361, whereinthe first connecting layer 41 surrounds the periphery of the conductivevia 35, the first insulating layer 361 is formed between thesemiconductor stack 1 and the first connecting layer 41 to electricallyinsulate the semiconductor stack 1 and the first connecting layer 41,and a plurality of connecting layers 41 formed in the plurality ofconductive vias 35 is electrically connected to each other through thesecond connecting layer 42. As shown in FIG. 9, the end 351 of theplurality of conductive vias 35 is exposed on the second surface S2 ofthe semiconductor stack 1, the first opening W1 and the second openingW2 are formed on the second surface S2 and the first surface S3respectively by pattering the first insulating layer 361, and theconnecting layer 4 covers the first opening W1 and exposes the secondopening W2. When the transparent conductive layer 19 includes astructure of multi layers, for example, includes the first transparentconductive layer 191 and the second transparent conductive layer 192,the end 351 of the conductive via 35 can extend into the firsttransparent conductive layer 191 which is more away from thesemiconductor stack 1 than other transparent conductive layers. In viewof the better lateral current spreading ability of the first transparentconductive layer 191, the current injected from the connecting layer 4is uniformly spreads in the first transparent conductive layer 191 andconducted to the second semiconductor layer 12 through the secondtransparent conductive layer 192.

A second insulating layer 362 can be deposited on the semiconductorstack 1 by evaporation or sputtering. A portion of the second insulatinglayer 362 covering the second connecting layer 42 and a portion of thesecond insulating layer 362 covering the second reflective layer 5 canbe removed through pattering to form a third opening W3 on the secondreflective layer 5 and expose the second reflective layer 5, and to forma fourth opening W4 on the second connecting layer 42 and expose thesecond connecting layer 42. From the top view of the semiconductorlight-emitting device III, the third opening W3 is larger than thesecond opening W2, the position of the third opening W3 and the positionof the second opening W2 are overlapped, and the position of the fourthopening W4 and the position of the first opening W1 can be overlapped orstaggered, as shown in FIG. 8. The material of the second insulatinglayer 362 includes non-conductive material including organic materials,such as Sub, benzocyclobutene (BCB), perfluorocyclobutane (PFCB), epoxy,acrylic resin, cyclic olefin copolymer (COC), polymethyl methacrylate(PMMA), polyethylene terephthalate (PET), polycarbonate (PC),polyetherimide, or fluorocarbon polymer; or inorganic materials, such assilicone, glass; dielectric materials, such as aluminum oxide (Al₂O₃),silicon nitride (SiN_(x)), silicon oxide (SiO₂), titanium oxide (TiO₂),or magnesium fluoride (MgF₂).

A first pad portion 43 and a second pad portion 53 are formed on thesame side of the semiconductor stack 1. The first pad portion 43 isformed on partial surface of the second insulating layer 362 to coverthe fourth opening W4 for electrically connecting to the connectinglayer 4. In an embodiment of the present application, a metal materialis deposited in the fourth opening W4 and the conductive via 35, themetal material is continuously deposited along the conductive via 35,the sidewall of the first insulating layer 361, and/or the secondinsulating layer 362 to cover partial surface of the second insulatinglayer 362 to form the first pad portion 43. As shown in thecross-sectional view of the semiconductor light-emitting device III, thefirst pad portion 43 includes a first face 431 and a second face 432protruding the first face 431, wherein the first face 431 and the secondface 432 are approximately parallel with the first surface S3 of thesemiconductor stack 1. A height D3 is formed between the first face 431and the second face 432, and the height D3 is larger than or equal to athickness of the second insulating layer 362.

As shown in FIG. 9, a portion of the surface of the second reflectivelayer 5 is not covered by the first insulating layer 361 and/or thesecond insulating layer 362. The metal material can be evaporated in theconductive via 35, the second opening W2 and/or the third opening W3,and the metal material is continuously deposited along the conductivevia 35, the sidewall of the first insulating layer 361 and/or thesidewall of the second insulating layer 362 to extend onto a portion ofthe second insulating layer 362 for forming the second pad portion 53.As shown in the cross-sectional view of the semiconductor light-emittingdevice III of FIG. 9, the second pad portion 53 includes a first face531 and a second face 532 protruding the first face 531, wherein thefirst face 531 and the second face 532 are approximately parallel withthe first surface S3 of the semiconductor stack 1. From a top view ofthe semiconductor light-emitting device III, the conductive via 35 isformed on an area covered by the first pad portion 43 and/or the secondpad portion 53. In an embodiment of the present application, concerningthe current spreading ability of the transparent conductive layer 19,one of the plurality of conductive vias 35 is formed in a region coveredby the first pad portion 43 and another one of the plurality ofconductive vias 35 is formed in a region covered by the second padportion 53. The shortest distance D1 between the two conductive vias 35is larger than the shortest distance D2 between the first pad portion 43and the second pad portion 53 as shown in FIG. 9.

From the top view of the semiconductor light-emitting device III, theconnecting layer 4 extends from the side e2 of the semiconductor stack 1to the side of the conductive via 35 to overlap with the forming regionsof the first pad portion 43 and the second pad portion 53, and cover theplurality of conductive vias 35 so as to connect the plurality ofconductive vias 35 as shown in FIG. 8, or locally forms between theplurality of conductive vias 35 to connect the plurality of conductivevias 35 with a patterned structure (not shown), for example, line ormesh.

An electrical current from external power source can be injected fromthe first pad portion 43 and conducted to the second semiconductor layer12 through the connecting layer 4 and the transparent conductive layer19. The material of the first pad portion 43 includes titanium (Ti),platinum (Pt), nickel (Ni), tin (Sn), gold (Au), or an alloy thereof.

The second pad portion 53 is formed on a portion of the contactstructure 30. When an electrical current from external power source isinjected into the second pad portion 53, the second pad portion 53 iselectrically connected with the first semiconductor layer 11 through thecontact structure 30. The material of the second pad portion 53 includestitanium (Ti), platinum (Pt), nickel (Ni), tin (Sn), gold (Au), or analloy thereof. An area of the first pad portion 43 can be the same as ordifferent from that of the second pad portion 53.

FIG. 10 illustrates a top view of a semiconductor light-emitting deviceIV in accordance with another embodiment of the present application.FIG. 11 illustrates a cross-sectional view along line A-A′ of FIG. 10.FIG. 12 illustrates a cross-sectional view along line B-B′ of FIG. 10.The semiconductor light-emitting device IV is a flip chip typelight-emitting diode device. As shown in FIG. 11 and FIG. 12, thesemiconductor light-emitting device IV includes a semiconductor stack 1including a first surface S3, a second surface S2 opposite to the firstsurface S3, and a side e2 connecting the first surface S3 and the secondsurface S2. The semiconductor stack 1 includes a first semiconductorlayer 11, a second semiconductor layer 12, and an active layer 10 formedbetween the first semiconductor layer 11 and the second semiconductorlayer 12, wherein the first surface S3 is the surface of the firstsemiconductor layer 11 and the second surface S2 is the surface of thesecond semiconductor layer 12. The first semiconductor layer 11 and thesecond semiconductor layer 12 such as cladding layers or confinementlayers comprise different conductivity types, electricity, polarity, ordopant elements to provide electrons and holes. The active layer 10 isformed between the first semiconductor layer 11 and the secondsemiconductor layer 12 so the electrons and the holes combine in theactive layer 10 under an electrical current to convert electrical energyto optical energy for emitting a light. The dominant wavelength of thelight is adjusted by changing physical and chemical compositions of oneor more layers in the semiconductor stack 1. The material of thesemiconductor stack 1 includes group III-V semiconductor materials, suchas Al_(x)In_(y)Ga_((1-x-y))N or Al_(x)In_(y)Ga_((1-x-y))P, wherein 0≤x,y≤1; (x+y)≤1. In accordance with the material of the active layer 10,the semiconductor stack 1 can emit a red light with a dominantwavelength between 610 nm and 650 nm, a green light with a dominantwavelength between 530 nm and 570 nm, or a blue light with a dominantwavelength between 450 nm and 490 nm. The active layer 10 includessingle heterostructure (SH), double heterostructure (DH), double-sidedouble heterostructure (DDH), or multi-quantum well (MQW) structure. Thematerial of the active layer 10 includes i-type, p-type, or n-typesemiconductor.

A plurality of contact structures 30 is uniformly distributed on thefirst surface S3 of the semiconductor stack 1 to ohmically contact thefirst semiconductor layer 11 for spreading the current on the firstsemiconductor layer 11. For example, a metal layer can be deposited onthe first surface S3 of the semiconductor stack 1 and patterned to forma plurality of contact structures 30. The material of the contactstructure 30 includes gold (Au), germanium (Ge), beryllium (Be), or analloy thereof. The shape of the contact structure 30 includes circle orpolygon. From the top view of the semiconductor light-emitting device IVof FIG. 10, the shape of the contact structure 30 is circle and aplurality of contact structures 30 is arranged into a plurality of rowson the semiconductor stack. 1, wherein the plurality of contactstructures 30 disposed on adjacent two rows is staggered.

A first reflective layer 331 including low refractive index materials isformed on the first surface S3 of the semiconductor stack 1, and/orbetween the plurality of contact structures 30. Furthermore, theplurality of contact structures 30 can be formed between the firstreflective layer 331 and the semiconductor stack 1. Because therefractive index of the group III-V semiconductor materials is between 2and 4, a material having a refractive index lower than that of the groupIII-V semiconductor materials is chosen to totally reflect the lightemitted from the active layer 10 between the first surface S3 and thefirst reflective layer 331 for increasing the light extractionefficiency of the semiconductor light-emitting device IV. The lowrefractive index material includes oxide, fluoride, or metal oxide. Thefluoride includes magnesium fluoride (MgF₂) or calcium fluoride (CaF₂).Metal oxide includes titanium oxide (TiO₂), tantalum oxide (Ta₂O₅),tellurium dioxide (TeO₂), yttrium oxide (Y₂O₃), hafnium oxide (HfO₂),aluminum oxide (Al₂O₃), indium zinc oxide (IZO), or indium tin oxide(ITO).

In order to increase the light extraction efficiency of thesemiconductor light-emitting device IV, the first surface S3 of thesemiconductor stack 1 can be a rough surface and/or a second reflectivelayer 5 is formed on the first surface S3. The method for forming therough surface includes etching, polishing, or printing. The etchingmethod includes wet etch, such as soaking in acidic or alkaline etchingsolution, or dry etching, such as ICP. The structure of the secondreflective layer 5 can be one or more layers. The material of the secondreflective layer 5 includes metal material with high reflectivity, suchas silver (Ag), gold (Au), aluminum (Al), titanium (Ti), chromium (Cr),copper (Cu), nickel (Ni), platinum (Pt), or an alloy thereof. The highreflectivity is 80% or above with respect to the dominant wavelength ofthe light emitted from the semiconductor light-emitting device IQ. Thesecond reflective layer 5 is more away from the semiconductor stack 1than the first reflective layer 331 so the light not reflected by thefirst reflective layer 331 can be further reflected by the secondreflective layer 5. As shown in FIG. 11 and FIG. 12, the secondreflective layer 5 contacts with the first reflective layer 331 and/orthe plurality of contact structures 30 for forming electrical connectionwhen electrical current is injected,

A transparent conductive layer 19 is formed on the second surface S2 ofthe semiconductor stack 1. The transparent conductive layer 19 includesa first side e3 and a second side e4. In a variant of the embodiment,the first side e3 and the second side e4 are approximately planar; inanother variant of the embodiment, the second side e4 protrudes thefirst side e3. The first side e3 of the transparent conductive layer 19and the side e2 of the semiconductor stack 1 are approximately planar.The transparent conductive layer 19 is electrically connected to thesemiconductor stack 1 when the electrical current is injected. Thematerial of the transparent conductive layer 19 includes transparentmaterial which is transparent to the light emitted from the active layer10. In order to reduce the total internal reflection of a light emittedfrom the active layer 10 on the second surface S2, the transparentconductive layer 19 includes non-group III-V semiconductor material. Therefractive index of the material of the transparent conductive layer 19is lower than that of the semiconductor stack 1, and the structure ofthe transparent layer 19 can be one or more layers, for example,includes a first transparent conductive layer 191 and a secondtransparent conductive layer 192. Specifically, when the transparentconductive layer is a structure of multi layers, the first transparentconductive layer 191, which is more away from the semiconductor stack 1than other transparent conductive layers, includes material forimproving lateral current spreading, for example, indium zinc oxide(IZO). The second transparent conductive layer 192, which is closer tothe semiconductor stack 1 than other transparent conductive layers,includes material for forming ohmically contact with the secondsemiconductor layer 12, for example, indium tin oxide (ITO).

In order to increase the light extraction efficiency of thesemiconductor light-emitting device IV, the second surface S2 of thesemiconductor stack 1 can be a rough surface to reduce total internalreflection. The method for forming the rough surface includes etching,polishing, or printing. The etching method includes wet etch, such assoaking acidic or alkaline etching solution, or dry etching, such asICP.

In other embodiments of the present application, a substrate 8 can beoptionally formed on the semiconductor stack 1. The substrate 8 can bebonded to the second surface S2 of the semiconductor stack 1 through thetransparent conductive layer 19. The substrate 8 includes transparentmaterial which is transparent to the light emitted from the active layer10, such as gallium arsenide (GaAs), gallium phosphide (GaP), galliumnitride (GaN), sapphire, diamond, glass, quartz, acrylic, zinc oxide(ZnO), or aluminum nitride (AlN). In order to reduce the total internalreflection of the light emitted from the active layer 10 on theinterface S1 between the substrate 8 and the transparent conductivelayer 19, the refractive index of the material of the substrate 8 issmaller than that of the transparent conductive layer 19, and therefractive index of the transparent conductive layer 19 is between therefractive index of the substrate 8 and the refractive index of thesemiconductor stack 1. Concerning the process yield, a side e1 of thesubstrate 8 and the second side e4 of the transparent conductive layer19 are approximately planar, and the side e1 of the substrate 8protrudes the side e2 of the semiconductor stack 1, as shown in FIG. 11.

In an embodiment of the present application, the conductive via 35extends from the first surface S3 to the second surface S2. As shown inFIG. 10, the conductive vias 35 surrounds the periphery of thesemiconductor stack 1 from the top view of the semiconductorlight-emitting device IV. As shown in FIG. 11, the conductive via 35 isformed on the side e2 of the semiconductor stack 1 by removing a portionof the semiconductor stack 1 such that the conductive via 35 is formedalong the side e2 of the semiconductor stack 1 by penetrating from thefirst surface S3 of the semiconductor stack 1, through the semiconductorstack 1 and exposing an end 351 of the conductive via 35 on a surface ofthe transparent conductive layer 19. In a variant of the embodiment, theend 351 of the conductive via 35 extends a depth into the transparentconductive layer 19 (not shown) by removing a portion of thesemiconductor stack 1 and a portion of the transparent conductive layer19. When the transparent conductive layer 19 includes a multi-layerstructure, for example, includes a first transparent conductive layer191 and a second transparent conductive layer 192, the end 351 of theconductive via 35 extends into the first transparent conductive layer191 which is more away from the semiconductor stack 1 than othertransparent conductive layers. The electrical current is uniformlydistributed in the first transparent conductive layer 191 through thefirst transparent conductive layer 191 having better lateral currentspreading ability than other transparent conductive layers. Then theelectrical current is conducted to the second semiconductor layer 12through the second transparent conductive layer 192. The formingpositions of the conductive vias 35 and the contact structure 30 arestaggered as shown in FIG. 10 and FIG. 11. A plurality of contactstructures 30 is formed on the first surface S3 of the semiconductorstack 1, and the conductive via 35 is formed on the side e2 of thesemiconductor stack 1 to surround the plurality of contact structures30.

A first insulating layer 361 can be deposited on the semiconductor stack1 and the conductive via 35 by evaporation. A portion of the firstinsulating layer 361 covering the end 351 of the conductive via 35 and aportion of the first insulating layer 361 covering the second reflectivelayer 5 can be removed through pattering to form a first opening W1 onthe end 351 of the conductive via 35 and expose the transparentconductive layer 19, and to form a second opening W2 on the secondreflective layer 5 and expose the second reflective layer 5. Thematerial of the first insulating layer 361 includes non-conductivematerial including organic materials, such as Sub, benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer; or inorganic materials, such as silicone, glass; dielectricmaterials, such as aluminum oxide (Al₂O₃), silicon nitride (SiN_(x)),silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesium fluoride(MgF₂).

As shown in FIG. 11, a conductive material, such as metal, is depositedin the conductive via 35 through evaporation or sputtering to cover thefirst opening W1 and a portion of the first insulating layer 361 to forma connecting layer 4. The connecting layer 4 includes a first connectinglayer 41 formed in the conductive via 35 and a second connecting layer42 formed on a side of the first insulating layer 361 opposite to thesecond reflective layer 5, wherein the first insulating layer 361 isformed between the semiconductor stack 1 and the first connecting layer41 to electrically insulate the semiconductor stack 1 and the firstconnecting layer 41. From a top view of the semiconductor light-emittingdevice IV (not shown), the connecting layer 4 can be a patternedstructure, for example, line or mesh, formed on the first surface S3 toelectrically connect to the conductive via 35. As shown in FIG. 11, theconnecting layer 4 can be connected to a side of the conductive via 35,or connected to a plurality of sides of the conductive via 35. As shownin FIG. 11 and FIG. 12, the connecting layer 4 surrounds the sidewall ofthe semiconductor stack 1 and connects the transparent conductive layer192 through the first opening W1.

A second insulating layer 362 can be deposited on the semiconductorstack 1 and the conductive via 35 by evaporation. A portion of thesecond insulating layer 362 covering the second connecting layer 42 anda portion of the second insulating layer 362 covering the secondreflective layer 5 can be removed through pattering to form a thirdopening W3 on the second reflective layer 5 and expose the secondreflective layer 5, and to form a fourth opening W4 on the secondconnecting layer 42 and expose the second connecting layer 42. From thetop view of the semiconductor light-emitting device IV, the thirdopening W3 is larger than the second opening W2, the position of thethird opening W3 and the position of the second opening W2 areoverlapped, and the position of the fourth opening W4 and the positionof the first opening W1 can be overlapped or staggered, as shown in FIG.8. The material of the second insulating layer 362 includesnon-conductive material including organic materials, such as Sub,benzocyclobutene (BCB), perfluorocyclobutane (PFCB), epoxy, acrylicresin, cyclic olefin copolymer (COC), polymethyl methacrylate (PMMA),polyethylene terephthalate (PET), polycarbonate (PC), polyetherimide, orfluorocarbon polymer; or inorganic materials, such as silicone, glass;dielectric materials, such as aluminum oxide (Al₂O₃), silicon nitride(SiN_(x)), silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesiumfluoride (MgF₂).

A first pad portion 43 and a second pad portion 53 are formed on thesame side of the semiconductor stack 1. The first pad portion 43 formson a part surface of the second insulating layer 362 and covers thefourth opening W4 to electrically connect the connecting layer 4. In anembodiment of the present application, a metal material is deposited onthe fourth opening W4 and continuously deposited to cover a part surfaceof the second insulating layer 362 to form the first pad portion 43. Asshown in the cross-sectional view of the semiconductor light-emittingdevice IV, the first pad portion 43 includes a first face 431 and asecond face 432 protruding the first face 431, wherein the first face431 and the second face 432 are approximately parallel with the firstsurface S3 of the semiconductor stack 1, a height is formed between thefirst face 431 and the second face 432, and the height is larger than orequal to a thickness of the second insulating layer 362.

As shown in FIG. 11, a part of the surface of the second reflectivelayer 5 is not covered by the first insulating layer 361 and/or thesecond insulating layer 362, a metal material can be evaporated in thesecond opening W2 and/or the third opening W3, and continuouslydeposited along the sidewall of the first insulating layer 361 and/orthe sidewall of the second insulating layer 362 to extend onto a part ofthe second insulating layer 362 to form the second pad portion 53. Asshown in the cross-sectional view of the semiconductor light-emittingdevice IV of FIG. 11, the second pad portion 53 includes a first face531 and a second face 532 protruding the first face 531, wherein thefirst face 531 and the second face 532 are approximately parallel withthe first surface S3 of the semiconductor stack 1. From a top view ofthe semiconductor light-emitting device IV, the connecting layer 4 isformed beyond the region of the second opening W2 and/or the thirdopening W3. The conductive via 35 surrounds the first pad portion 43and/or the second pad portion 53, and the connecting layer 4 is formedin the region of the first pad portion 43 and/or the second pad portion53.

An electrical current from external power source can be injected fromthe first pad portion 43, and the electrical current is conducted to thesecond semiconductor layer 12 through the connecting layer 4 and thetransparent conductive layer 19. The material of the first pad portion43 includes titanium (Ti), platinum (Pt), nickel (Ni), tin (Sn), gold(Au), or an alloy thereof.

The second pad portion 53 is formed on a part of the contact structure30. When an electrical current from external power source is injectedinto the second pad portion 53, the second pad portion 53 iselectrically connected with the first semiconductor layer 11 through thecontact structure 30. The material of the second pad portion 53 includestitanium (Ti), platinum (Pt), nickel (Ni), tin (Sn), gold (Au), or analloy thereof. An area of the first pad portion 43 can be the same as ordifferent from that of the second pad portion 53.

FIGS. 13-20 illustrate a method of manufacturing a semiconductorlight-emitting device V in accordance with an embodiment of the presentapplication, in which FIGS. 13A, 14A, 15A, 16A, 17A, 18A, 19A, and 20Aare plan views, and FIGS. 13B, 14B, 15B, 16B, 17B, 18B, 19B, 20B aresectional views respectively taken along line X-X′ in FIGS. 13A, 14A,15A, 16A, 17A, 18A, 19A, and 20A.

Referring to FIG. 13A and FIG. 13B, a semiconductor stack 100 is formedon a growth substrate 110. The growth substrate 110 can be a sapphiresubstrate, but is not limited thereto. The semiconductor stack 100includes a first semiconductor layer 101, a second semiconductor layer102, and an active layer 103 formed between the first semiconductorlayer 101 and the second semiconductor layer 102. Each of the firstsemiconductor layer 101 and the second semiconductor layer 102 can becomposed of a single layer or multiple layers. Further, the active layer103 can have a single-quantum well structure or multi-quantum wellstructure. The semiconductor stack 100 can be formed of group IIInitride based compound semiconductor on the growth substrate 110 bymetal organic chemical vapor deposition (MOCVD) or molecular beamepitaxy (MBE). A buffer layer (not shown) can be formed before formingthe compound semiconductor layers. The buffer layer is formed to relievelattice mismatch between the growth substrate 110 and the semiconductorstack 100 and can be formed of a GaN-based material layer, such asgallium nitride, aluminum gallium nitride or aluminum nitride. Thesemiconductor stack 100, including an outer periphery 1011, is patternedby removing portions of the first semiconductor layer 101, the secondsemiconductor layer 102, and the active layer 103 to form a plurality ofvias 120 exposing a surface 1012S of the first semiconductor layer 101,a surrounding region 1200 exposing a periphery surface 1011S of thefirst semiconductor layer 101, and one or a plurality of semiconductorconstructions 1000 surrounded by the surrounding region 1200. Thesemiconductor stack 100 can be patterned by photolithography and etchingprocess. The plurality of semiconductor constructions 1000 is connectedto each other through the first semiconductor layer 101. Thesemiconductor construction 1000 includes an upper part and a lower part,wherein the lower part includes a width larger than a width of the upperpart in a sectional view. The plurality of vias 120 includes a circularshape in a plan view, and/or the surrounding region 1200 includes arectangular shape in a plan view, but is not limited thereto. The one orthe plurality of semiconductor constructions 1000 includes an inclinedsidewall 1021. The second semiconductor layer 102 and the active layer103 are exposed to the surrounding region 1200 and the plurality of vias120. The upper part of the semiconductor construction 1000 and theperiphery surface 1011S of the first semiconductor layer 101 isconnected by the inclined sidewall 1021.

Referring to FIG. 14A and FIG. 14B, a first insulating layer 6000 isformed to cover the surface 1012S of the first semiconductor layer 101in the plurality of vias 120, and the inclined sidewall 1021 of thesemiconductor construction 1000. In other words, the first insulatinglayer 6000 includes a first group of first insulating regions 6001corresponding to the plurality of vias 120, and a second group of firstinsulating openings 6002 respectively formed on the upper part of theone or the plurality of semiconductor constructions 1000 to expose thesecond semiconductor layer 102. The first insulating layer 6000 includesa single layer or multiple layers, such as a silicon oxide or siliconnitride film. Alternatively, the first insulating layer 6000 includes adistributed Bragg reflector, which is formed by alternately stackinginsulation layers having different refraction indices. For example, thefirst insulating layer 6000 can be formed by alternately stackingSiO_(x)/TiO_(x).

Referring to FIG. 15A and FIG. 15B, a transparent conductive layer 300is formed on the second semiconductor layer 102 except for the firstgroup of first insulating regions 6001. In other words, the transparentconductive layer 300 is only formed in the second group of firstinsulating openings 6002 and directly contacts the second semiconductorlayer 102. A periphery 3001 of the transparent conductive layer 300 doesnot contact the first insulating layer 6000. The transparent conductivelayer 300 includes a transparent conductive oxide film, such as indiumtin oxide (ITO), or a thin metal film, such as silver (Ag) or aluminum(Al). The transparent conductive layer 300 can be configured to form anohmic contact with the second semiconductor layer 102. The transparentconductive layer 300 includes a single layer or multiple layers.

Referring to FIG. 16A and FIG. 16B, a reflective layer 310 is formed onthe second semiconductor layer 102 except for the first group of firstinsulating regions 6001, and a barrier layer 320 is formed on thereflective layer 310 except for the first group of first insulatingregions 6001. In other words, the reflective layer 310 and the barrierlayer 320 are only formed in the second group of first insulatingopenings 6002. A periphery 3101 of the reflective layer 310 can bealigned with the periphery 3001 of the transparent conductive layer 300or be formed outside of the periphery 3001 of the transparent conductivelayer 300. A periphery 3201 of the barrier layer 320 can be aligned withthe periphery 3101 of the reflective layer 310 or be formed outside ofthe periphery 3101 of the reflective layer 310. When the periphery 3201of the barrier layer 320 is formed outside the periphery 3101 of thereflective layer 310, the reflective layer 310 is covered by the barrierlayer 320, and the barrier layer 320 contacts the second semiconductorlayer 102. Both the periphery 3201 of the barrier layer 320 and theperiphery 3101 of the reflective layer 310 are separated from the firstinsulating layer 6000. The reflective layer 310 can comprise a singlelayer structure or a multi-layer structure, and the material of thereflective layer 310 includes metal material with high reflectivity,such as silver (Ag), gold (Au), aluminum (Al), titanium (Ti), chromium(Cr), copper (Cu), nickel (Ni), platinum (Pt), or an alloy thereof. Thebarrier layer 320 can comprise a single layer structure or a multi-layerstructure, and the material of the barrier layer 320 includes Cr, Pt,Ti, TiW, W, or Zn. When the barrier layer 320 is a multi-layerstructure, the barrier layer 320 is alternately stacked by a firstbarrier layer (not shown) and a second barrier layer (not shown), forexample, Cr/Pt, Cr/Ti, Cr/TW, Cr/W, Cr/Zn, Ti/Pt, Ti/W, Ti/TiW, Ti/W,Ti/Zn, Pt/TiW, Pt/W, Pt/Zn, TiW/W, TiW/Zn, or W/Zn.

Referring to FIG. 17A and FIG. 17B, a second insulating layer 700 isformed to continuously cover the upper part and the inclined sidewalls1021 of the one or the plurality of semiconductor constructions 1000.The second insulating layer 700 includes a first group of secondinsulating openings 7001 respectively corresponding to the plurality ofvias 120, wherein the first group of first insulating regions 6001 ofthe first insulating layer 6000 formed in the plurality of vias 120 ispartially removed to form a plurality of first insulating openings 6003by etching at the step of forming the first group of second insulatingopenings 7001, and the first group of second insulating openings 7001and the plurality of first insulating openings 6003 expose the surface1012S of the first semiconductor layer 101. The second insulating layer700 further includes a second group of second insulating openings 7002formed on the upper part of part of the plurality of semiconductorconstructions 1000 to expose the barrier layer 320 and/or the reflectivelayer 310. The second insulating layer 700 includes a single layer ormultiple layers, such as a silicon oxide or silicon nitride film.Alternatively, the second insulating layer 700 includes a distributedBragg reflector, which is formed by alternately stacking insulationlayers having different refraction indices. For example, the secondinsulating layer 700 can be formed by alternately stackingSiO_(x)/TiO_(x).

Referring to FIG. 18A and FIG. 18B, a metal layer 200 is formed to coverthe one or the plurality of semiconductor constructions 1000 and theplurality of vias 120, except for regions corresponding to the secondgroup of second insulating openings 7002. Specifically, the metal layer200 is formed to continuously cover the upper part and the inclinedsidewalls 1021 of the one or the plurality of semiconductorconstructions 1000, the plurality of vias 120, and the periphery surface1011S of the first semiconductor layer 101. The patterned metal layer200 is as the contact structure of prior embodiments and includes one ormore opening 2002 to expose the reflective layer 310 and/or the barrierlayer 320, wherein a position of the one or more opening 2002 iscorresponding to that of the second group of second insulating openings7002.

Referring to FIG. 19A and FIG. 19B, a third insulating layer 800 isformed to continuously cover the upper part and the inclined sidewalls1021 of the one or the plurality of semiconductor constructions 1000,and the plurality of vias 120. The third insulating layer 800 includesone or a first group of third insulating openings 8001 formed on thefirst metal layer 200 at regions corresponding to part of the pluralityof vias 120, wherein the one or the first group of third insulatingopenings 8001 exposes the first metal layer 200. In other words, the oneor the first group of third insulating openings 8001 and part of theplurality of vias 120 are overlapped. In another example of theembodiment, the one or the first group of third insulating openings 8001is formed on the first metal layer 200 except for regions correspondingto the plurality of vias 120. In other words, the one or the first groupof third insulating openings 8001′ and the plurality of vias 120 are notoverlapped as shown in FIG. 19A. The third insulating layer 800 furtherincludes one or a second group of third insulating openings 8002respectively corresponding to the one or the second group of secondinsulating openings 7002, wherein the one or the second group of thirdinsulating openings 8002 expose the barrier layer 320 and/or thereflective layer 310. The third insulating layer 800 includes a singlelayer or multiple layers, such as a silicon oxide or silicon nitridefilm. Alternatively, the third insulating layer 800 includes adistributed Bragg reflector, which is formed by alternately stackinginsulation layers having different refraction indices. For example, thethird insulating layer 800 can be formed by alternately stackingSiO_(x)/TiO_(x).

Referring to FIG. 20A and FIG. 20B, a first pad portion 400 and a secondpad portion 500 are formed on the third insulating layer 800. The firstpad portion 400 is separated from the second pad portion 500 with ashortest distance D larger than 30 μm, preferable a space between thefirst pad portion 400 and the second pad portion 500 is between 50 μmand 250 μm. The first pad portion 400 is connected to the first metallayer 200 through the one or the first group of third insulatingopenings 8001, and the second pad portion 500 is connected to thereflective layer 310 and/or the barrier layer 320 through the one or thesecond group of third insulating openings 8002.

FIG. 21 illustrates a top view of the semiconductor light-emittingdevice V in accordance with an embodiment of the present application;FIG. 22 illustrates a cross-sectional view along line C-C′ of FIG. 21;and FIG. 23 illustrates a cross-sectional view along line D-D′ of FIG.21. The semiconductor light-emitting device V is a flip chip typelight-emitting diode device. As shown in FIG. 22 and FIG. 23, thesemiconductor light-emitting device V includes a substrate 110, asemiconductor stack 100 formed on the substrate 110. The semiconductorstack 100 includes a first semiconductor layer 101, a secondsemiconductor layer 102, and an active layer 103 formed between thefirst semiconductor layer 101 and the second semiconductor layer 102. Inan example of the embodiment, the substrate 110 can be a growthsubstrate of the semiconductor stack 100, and the material of thesubstrate 110 includes gallium arsenide (GaAs), gallium phosphide (GaP),gallium nitride (GaN), sapphire, silicon carbide (SiC), diamond, glass,quartz, acrylic, zinc oxide (ZnO), or aluminum nitride (AlN). In anotherexample of the embodiment, the substrate 110 can be a support substrate,which is bonded to the semiconductor stack 100 through adhesivematerials including organic material, such as Sub, benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer; or inorganic materials, such as silicone, or glass; ordielectric materials, such as aluminum oxide (Al₂O₃), silicon nitride(SiN_(x)), silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesiumfluoride (MgF₂). The first semiconductor layer 101 and the secondsemiconductor layer 102, such as cladding layers, or confinement layers,comprise different conductivity types, electricity, polarity, or dopantelements to provide electrons and holes. The active layer 103 is formedbetween the first semiconductor layer 101 and the second semiconductorlayer 102, so the electrons and the holes combine in the active layer103 under an electrical current to convert electrical energy to opticalenergy for emitting a light. The dominant wavelength of the light isadjusted by changing physical and chemical compositions of one or morelayers in the semiconductor stack 100. The material of the semiconductorstack 100 includes group III-V semiconductor materials, such asAl_(x)In_(y)Ga_((1-x-y))N or Al_(x)In_(y)Ga_((1-x-y))P, wherein 0≤x,y≤1; (x+y)≤1. In accordance with the material of the active layer 103,the semiconductor stack 100 can emit a red light with a dominantwavelength between such as 610 nm and 650 nm, a green light with adominant wavelength between such as 530 nm and 570 nm, a blue light witha dominant wavelength between such as 450 nm and 490 nm, or anultraviolet (UV) light with a dominant wavelength between such as 230 nmand 400 nm. The active layer 103 includes single heterostructure (SH),double heterostructure (DH), double-side double heterostructure (DDH),or multi-quantum well (MQW) structure. The material of the active layer103 includes i-type, p-type, or n-type semiconductor.

Parts of the active layer 103 and the second semiconductor layer 102away from an outer periphery 1011 of the semiconductor stack 100 areremoved to form a plurality of vias 120. The plurality of vias 120penetrates the semiconductor stack 100 to expose the surface 1012S ofthe first semiconductor layer 101. Another part of the active layer 103and the second semiconductor layer 102 near the outer periphery 1011 ofthe semiconductor stack 100 are removed to form a ring-like exposingperiphery surface 1011S of the first semiconductor layer 101, whereinthe ring-like exposing periphery surface 1011S is along an outerperiphery of the semiconductor light-emitting device V. In other words,the ring-like exposing periphery surface 1011S surrounds the activelayer 103 and the second semiconductor layer 102. In an example of theembodiment, the plurality of vias 120 is arranged into a plurality ofrows. The plurality of vias 120 disposed on adjacent two rows can bealigned or staggered. Each of the plurality of vias 120 includes ashape, such as circle, ellipse, or finger in top view of thesemiconductor light-emitting device V. The method for forming theplurality of vias 120 includes wet etching or dry etching.

A first insulating layer 6000 is deposited on the semiconductor stack100 to surround the active layer 103 to protect the epitaxial quality ofthe active layer 103 from being damaged by the following process. Thefirst insulating layer 6000 is patterned by lithography technique toprovide a plurality of first insulating openings 6002, 6003 on thesemiconductor stack 100. As shown in FIG. 22, the plurality of firstinsulating openings 6002, 6003 of the first insulating layer 6000respectively exposes the second semiconductor layer 102 and the firstsemiconductor layer 101.

A transparent conductive layer 300 is formed on the first insulatingopening 6002 provided on the second semiconductor layer 102. Thetransparent conductive layer 300 is electrically connected to thesemiconductor stack 100 when the electrical current is injected. Thematerial of the transparent conductive layer 300 includes transparentmaterial which is transparent to the light emitted from the active layer103. The structure of the transparent conductive layer 300 can be one ormore layers.

A reflective layer 310 is formed on the second semiconductor layer 102for increasing the light extraction efficiency of the semiconductorlight-emitting device V, and a barrier layer 320 is formed on thereflective layer 310 for protecting the reflective layer 310 andpreventing the metal element of the reflective layer 310 diffusing out.In an example of the embodiment, the reflective layer 310 directlycontacts the second semiconductor layer 102. In an example of theembodiment, the reflective layer 310 directly contacts the transparentconductive layer 300. A sidewall of the barrier layer 320 can be alignedwith a sidewall of the reflective layer 310 or extend to outside of asidewall of the reflective layer 310. When the sidewall of the barrierlayer 320 is formed beyond the sidewall of the reflective layer 310, thereflective layer 310 is covered by the barrier layer 320, and a portionof the barrier layer 320 directly contacts the second semiconductorlayer 102 or the transparent conductive layer 300. The reflective layer310 can include a single layer structure or a multi-layer structure, andthe material of the reflective layer 310 includes metal material withhigh reflectivity, such as silver (Ag), gold (Au), aluminum (Al),titanium (Ti), chromium (Cr), copper (Cu), nickel (Ni), platinum (Pt),or an alloy thereof. The barrier layer 320 can include a single layerstructure or a multi-layer structure, and the material of the barrierlayer 320 includes Cr, Pt, Ti, TiW, W, or Zn. When the barrier layer 320is a multi-layer structure, the barrier layer 320 is alternately stackedby a first barrier layer (not shown) and a second barrier layer (notshown), for example, Cr/Pt, Cr/Ti, Cr/TW, Cr/W, Cr/Zn, Ti/Pt, Ti/W,Ti/TiW, Ti/W, Ti/Zn, Pt/TiW, Pt/W, Pt/Zn, TiW/W, TiW/Zn, or W/Zn.

A second insulating layer 700 is deposited on the semiconductor stack100 to surround the active layer 103. The second insulating layer 700 ispatterned by lithography technique to provide a first group of secondinsulating openings 7001 and a second group of second insulatingopenings 7002 on the semiconductor stack 100. As shown in FIG. 22 andFIG. 23, the first group of second insulating openings 7001 of thesecond insulating layer 700 exposes the first semiconductor layer 101,and the second group of second insulating openings 7002 of the secondinsulating layer 700 exposes the barrier layer 320. In an example of theembodiment, the first group of second insulating openings 7001 includesa width different from that of the second group of second insulatingopenings 7002. In another example of the embodiment, a number of thefirst group of second insulating openings 7001 is different from that ofthe second group of second insulating openings 7002. In another exampleof the embodiment, the second group of second insulating openings 7002is only formed on one side of the semiconductor stack 100 from a topview of the semiconductor light-emitting device V. In another example ofthe embodiment, a position of the first group of second insulatingopenings 7001 is respectively corresponding to that of the plurality ofvias 120.

A patterned metal layer 200 covers a portion of the second semiconductorlayer 102, the plurality of vias 120, and the ring-like exposingperiphery surface 1011S, except for regions corresponding to the secondgroup of second insulating openings 7002 and the side wall of the outerperiphery 1011 of the semiconductor light-emitting device V, wherein thering-like exposing surface 1011S is formed along the outer periphery1011 of the semiconductor light-emitting device V. Specifically, from atop view of the semiconductor light-emitting device V, the patternedmetal layer 200 includes an area larger than that of the active layer103. As shown in FIG. 22 and FIG. 23, a portion of the patterned metallayer 200 is formed on the transparent conductive layer 300, thereflective layer 310, or the barrier layer 320. The patterned metallayer 200 comprises one or more opening 2002 to expose the reflectivelayer 310 and/or the barrier layer 320.

In another embodiment, the patterned metal layer 200 covers a portion ofthe second semiconductor layer 102, the plurality of vias 120, coversthe ring-like exposing periphery surface 1011S, and also extends to theside wall of the outer periphery 1011 of the semiconductorlight-emitting device V which is the side wall of the firstsemiconductor layer 101. In another embodiment, similar to aboveembodiments, the patterned metal layer 200 can extend to the surface ofthe substrate 110 not covered by the first semiconductor layer 101. Thepatterned metal layer 200 can be a single layer structure or amulti-layer structure. The material of the patterned metal layer 200includes metal such as Al, Cr, Pt, Ti, TiW, W, or Zn.

A third insulating layer 800 is deposited on the semiconductor stack100. The third insulating layer 800 is patterned by lithographytechnique to provide a first group of third insulating openings 8001 anda second group of third insulating openings 8002 on the semiconductorstack 100. As shown in FIG. 22 and FIG. 23, the first group of thirdinsulating openings 8001 of the third insulating layer 800 exposes thepatterned metal layer 200. The second group of third insulating openings8002 of the third insulating layer 800 exposes the transparentconductive layer 300, the reflective layer 310, or the barrier layer320. In an example of the embodiment, the first group of thirdinsulating openings 8001 and the second group of third insulatingopenings 8002 are formed on two sides of the semiconductor stack 100from a top view of the semiconductor light-emitting device V. In anotherexample of the embodiment, a number of the first group of thirdinsulating openings 8001 is different from that of the second group ofthird insulating openings 8002.

The material of the first insulating layer 6000, the second insulatinglayer 700, and the third insulating layer 800 includes non-conductivematerial comprising organic materials, such as Sub, benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer; or inorganic materials, such as silicone, or glass; ordielectric materials, such as aluminum oxide (Al₂O₃), silicon nitride(SiN_(x)), silicon oxide (SiO₂), titanium oxide (TiO₂), or magnesiumfluoride (MgF₂). The first insulating layer 6000, the second insulatinglayer 700, and the third insulating layer 800 can be formed by printing,evaporation or sputtering.

A first pad portion 400 covers one portion of the plurality of vias 120and electrically connected to the first semiconductor layer 101. Asecond pad portion 500 covers another portion of the plurality of vias120 and electrically connected to the second semiconductor layer 102.The first pad portion 400 is electrically connected to the firstsemiconductor layer 101 through the first group of third insulatingopening 8001 of the third insulating layer 800, and the second padportion 500 is electrically connected to the second semiconductor layer102 through the second group of third insulating opening 8002 of thethird insulating layer 800 and the opening 2002 of the patterned metallayer 200. The material of the first pad portion 400 and the second padportion 500 includes titanium (Ti), platinum (Pt), nickel (Ni), tin(Sn), gold (Au), or an alloy thereof. An area of the first pad portion400 can be the same as or different from that of the second pad portion500.

FIG. 5 illustrates a structure diagram in accordance with anotherembodiment of the present application. A light bulb 600 includes anenvelope 602, a lens 604, a light-emitting module 610, a base 612, aheat sink 614, a connector 616 and an electrical connecting device. Thelight-emitting module 610 includes a submount 60 and a plurality oflight-emitting devices 608, which is described in above embodiments,formed on the submount 606.

FIGS. 24A, 24B, and 25A-31C illustrate a method of manufacturing asemiconductor light-emitting device T in accordance with an embodimentof the present application, in which FIGS. 24A, 25A, 26A, 27A, 28A, 29A,30A, and 31A are plan views, FIGS. 24B, 25B, 26B, 27B, 28B, 29B, 30B,31B are sectional views respectively taken along line α-α′ shown inFIGS. 24A, 25A, 26A, 27A, 28A, 29A, 30A, and 31A, and FIGS. 28C, 29C,30C, 31C are sectional views respectively taken along line β-β′ shown inFIGS. 28A, 29A, 30A, and 31A.

Referring to FIG. 24A and FIG. 24B, a method of manufacturing asemiconductor light-emitting device T includes forming a semiconductorstack t100 on a growth substrate t110. The growth substrate t110 can bea sapphire substrate, but is not limited thereto. In one embodiment, thegrowth substrate t110 includes a patterned surface. The pattern surfaceincludes a plurality of patterns. The shape of the pattern includescorn, pyramid or hemisphere. The semiconductor stack t100 includes afirst semiconductor layer t101 having a periphery side surface t1011S, asecond semiconductor layer t102, and an active layer t103 formed betweenthe first semiconductor layer t101 and the second semiconductor layert102. Each of the first semiconductor layer t101 and the secondsemiconductor layer t102 can be composed of a single layer or multiplelayers. Further, the active layer t103 can have a single-quantum wellstructure or multi-quantum well structure. The semiconductor stack t100can be formed of group III nitride based compound semiconductor on thegrowth substrate t110 by metal organic chemical vapor deposition (MOCVD)or molecular beam epitaxy (MBE). A buffer layer (not shown) can beformed before forming the semiconductor stack t100. The buffer layer isformed to relieve lattice mismatch between the growth substrate t110 andthe semiconductor stack t100 and can be formed of a GaN-based materiallayer, such as gallium nitride and aluminum gallium nitride, or anAlN-based material layer. The buffer layer can be a single layer ormultiple layers. The buffer layer can be formed by metal organicchemical vapor deposition (MOCVD), molecular beam epitaxy (MBE) orphysical vapor deposition (PVD). The PVD method includes a sputteringmethod, for example, reactive sputtering method or an evaporationmethod, such as e-beam evaporation method and thermal evaporationmethod. In one embodiment the buffer layer includes an AlN buffer layerand is formed by the sputtering method. The AlN buffer layer is formedon a growth substrate with a patterned surface. The sputtering methodcan produce a dense buffer layer with high uniformity, and therefore theAlN buffer layer can conformably deposit on the patterned surface of thegrowth substrate.

After forming the semiconductor stack t100, the semiconductor stack t100is patterned by photolithography and etching process, and a plurality offirst trenches t120 a and a second trench t120 b are formed in thesemiconductor stack t100 accordingly. In the embodiment, the pluralityof first trenches t120 a and the second trench t120 b are similar to thedepressions/paths of prior embodiments. A plurality of semiconductorconstructions t1000 is defined by the plurality of first trenches t120 aand the second trench t120 b. Specifically, the plurality of firsttrenches t120 a and the second trench t120 b are formed by removingportions of the first semiconductor layer t101, the second semiconductorlayer t102, and the active layer t103 so that a surface t1012S of thefirst semiconductor layer t101 is exposed, and the plurality ofsemiconductor constructions t1000 is formed. Herein the periphery sidesurface t1011S of the first semiconductor layer t101 connects thesurface t1012S of the first semiconductor layer t101.

The plurality of semiconductor constructions t1000 is connected to eachother through a portion of the first semiconductor layer t101corresponding to the first trenches t120 a and the second trench t120 b.Additionally, each of the plurality of semiconductor constructions t1000includes an inclined sidewall t1021S, and an upper surface t1000 uS ofthe semiconductor construction t1000 and the surface t1012S of the firstsemiconductor layer t101 are connected by the inclined sidewall t1021S.

In the embodiment, the plurality of first trenches t120 a and the secondtrench t120 b penetrate the second semiconductor layer t102 and theactive layer t103. The second trench t120 b exposes the periphery regionof the first semiconductor layer t101. The second trench t120 b isdisposed near outmost edges of the semiconductor stack t100 and alsonear outmost edges of the active layer 103. In other words, the secondtrench t120 b is disposed near a periphery of the growth substrate t110.Each of the plurality of first trenches t120 a is interposed between thesemiconductor constructions t1000, and the plurality of first trenchest120 a is surrounded by the second trench t120 b. The plurality of firsttrenches t120 a and the second trench t120 b surround the active layert103 and the second semiconductor layer t102. Herein a width W₁ of oneof the plurality of first trenches t120 a is greater than a width W₂ ofthe second trench t120 b, for example, W₁=2W₂. The first trenches t120 aare parallel to each other, and two ends of each of the plurality offirst trenches t120 a are connected to the second trench t120 b. In atop view, a shape of one of the plurality of first trenches t120 aincludes a stripe, a shape of the second trench t120 b includes ageometric shape, for example, a ring-like shape. The second trench t120b surrounds the active layer t103 and the second semiconductor layert102 and is disposed near the periphery side surface t1011S of the firstsemiconductor layer t101. The plurality of first trenches t120 a and thesecond trench t120 b compose a plurality of closed geometric shapes, forexample, rectangles. In the embodiment, the number of the second trencht120 b is one, and the active layer t103 and the second semiconductorlayer t102 b are surrounded by the second trench t120 b in a top view,but the application is not limited hereto.

Referring to FIGS. 24C and 24D, FIG. 24C illustrates a top view oftrenches in a semiconductor stack t100′ on the substrate t110 inaccordance with one embodiment of the present application, and FIG. 24Dillustrates a top view of trenches in a semiconductor stack t100″ on thesubstrate t110 in accordance with one embodiment of the presentapplication. The structures of the semiconductor stacks t100′, t100″ arethe same as that of the semiconductor stacks t100. The difference isthat, in FIG. 24C, there are a plurality of first trenches t120 a′ and aplurality of second trenches t120 b′, wherein the second trenches t120b′ can be separated from one another and surround the active layer.Specifically, there are four first trenches t120 a′ shown in FIG. 24C,each two of the first trenches t120 a′ are branched from two of theplurality of second trenches t120 b′ respectively. Additionally, in FIG.24D, there are a plurality of first trenches t120 a″ and a plurality ofsecond trenches t120 b″. The plurality of second trenches t120 b″surrounds the active layer (not shown in the figure) and is disposednear the periphery of the substrate t110 and also near the periphery ofthe substrate t110. The plurality of second trenches t120 b″ composes arectangular dashed ring.

Referring to FIG. 25A and FIG. 25B, a transparent conductive layer t300is formed on the second semiconductor layer t102 in the following step.In one embodiment, the transparent conductive layer t300 directlycontacts the second semiconductor layer t102, spreads current and theninjects current to the second semiconductor layer t102. The transparentconductive layer t300 does not contact the first semiconductor layert101. The transparent conductive layer t300 includes a transparentconductive oxide film, such as indium tin oxide (ITO), or indium zincoxide (IZO). The transparent conductive layer t300 can be configured toform a low-resistance contact, for example, ohmic contact, with thesecond semiconductor layer t102. The transparent conductive layer t300includes a single layer or multiple layers. For example, as thetransparent conductive layer t300 includes multiple sub-layers, thetransparent conductive layer t300 can be a distributed Bragg reflector(DBR) which includes a plurality pairs of sub-layers and each sub-layerhas a refractive index different from that of adjacent sub-layers.Specifically, the transparent conductive layer t300 can be formed byalternately stacking two sub-layers made of different materials withdifferent refractive index to be the distributed Bragg reflector (DBR).

Referring to FIG. 26A and FIG. 26B, a first insulating layer t600 isformed to cover the periphery side surface t1011S of the firstsemiconductor layer t101, the surface t1012S of the first semiconductorlayer t101 and the inclined sidewalls t1021S. In other words, the firstinsulating layer t600 includes a first group of first insulating regionst600 a formed on the surface t1012S and the inclined sidewalls t1021S ofthe semiconductor construction t1000, which correspond to the pluralityof first trenches t120 a, and a second group of first insulating regionst600 b formed on the periphery side surface t1011S, the surface t1012Sof the first semiconductor layer t101 and the inclined sidewalls t1021Scorresponding to the second trench t120 b. A material of the firstinsulating layer t600 can be a non-conductive material. Herein thenon-conductive material includes organic materials, such as Sub,benzocyclobutene (BCB), perfluorocyclobutane (PFCB), epoxy, acrylicresin, cyclic olefin copolymers (COC), polymethyl methacrylate (PMMA),polyethylene terephthalate (PET), polyimide (PI), polycarbonate (PC),polyetherimide, or fluorocarbon polymer, or inorganic materials, such assilicone, glass, aluminum oxide (Al₂O₃), silicon nitride (SiN_(x)),silicon oxide (SiO_(x)), titanium dioxide (TiO₂), or magnesium fluoride(MgF_(x)). The first insulating layer t600 includes a single layer ormultiple layers. When the first insulating layer t600 includes multiplelayers, the first insulating layer t600 can be a distributed Braggreflector (DBR) which includes a plurality pairs of sub-layers, and eachsub-layer has a refractive index different from that of adjacentsub-layers. Specifically, the first insulating layer t600 can be formedby alternately stacking a SiO_(x) sub-layer and a TiO_(x) sub-layer. TheDBR provides a high reflectivity for particular wavelength or within aparticular wavelength range by setting the refractive index differencebetween each pair of the sub-layers with a high refractive index and alow refractive index respectively. The thicknesses of two sub-layers ineach pair can be different. The thicknesses of the sub-layers in eachpair with the same material can be the same or different.

Referring to FIG. 27A and FIG. 27B, a reflective layer t310 is formed onthe transparent conductive layer t300 and aligned with transparentconductive layer t300. A shape of the reflective layer t310 correspondsto a shape of the transparent conductive layer t300, and in theembodiment, the shape of the reflective layer t310 is similar to arectangle, and corners of the reflective layer t310 are curve-like. Thereflective layer t310 can include a single layer structure or amulti-layer structure, and the material of the reflective layer t310includes a metal material with a high reflectivity for the light emittedby the active layer t103, such as silver (Ag), gold (Au), aluminum (Al),titanium (Ti), chromium (Cr), copper (Cu), nickel (Ni), or platinum (Pt)or an alloy thereof. A barrier layer (not shown) can be formed on andcover the reflective layer t310 so that the barrier layer can preventmigration, diffusion or oxidation of the reflective layer t310. Thebarrier layer can include a single layer structure or a multi-layerstructure, and the material of the barrier layer includes chromium (Cr),platinum (Pt), titanium (Ti), tungsten (W), or zinc (Zn). When thebarrier layer is the multi-layer structure, the barrier layer isalternately stacked by a first barrier layer (not shown) and a secondbarrier layer (not shown), for example, Cr/Pt, Cr/Ti, Cr/TiW, Cr/W,Cr/Zn, Ti/Pt, Ti/W, Ti/TiW, Ti/W, Ti/Zn, Pt/TiW, Pt/W, Pt/Zn, TiW/W,TiW/Zn, or W/Zn.

Referring to FIGS. 28A-28C, FIG. 28B and FIG. 28C are cross-sectionalviews taken along lines α-α′ and β-β′ shown in FIG. 28A. After formingthe reflective layer t310, an insulating layer is formed on theplurality of semiconductor constructions t1000 to cover the reflectivelayer t310, the first group of first insulating regions t600 a, and thesecond group of first insulating regions t600 b. Sequentially, parts ofthe insulating layer are removed to expose portions of the reflectivelayer t310, the periphery side surface t1011S, and the surface t1012S bya photolithography and etching process to form a second insulating layert700. Notably, at the same photolithography and etching process, aportion of the first group of first insulating regions t600 a is removedaway to expose the surface t1012S. In the embodiment, the secondinsulating layer t700 includes a group of second insulating openingst7001 to expose the reflective layer t310. A shape of the exposedreflective layer t310 corresponds to a shape of the group of secondinsulating openings t7001. A material of the second insulating layert700 can be a non-conductive material. Herein the non-conductivematerial includes organic materials, such as Sub, benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymers (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polyimide (PI), polycarbonate (PC), polyetherimide,or fluorocarbon polymer, or inorganic materials, such as silicone,glass, aluminum oxide (Al₂O₃), silicon nitride (SiN_(x)), silicon oxide(SiO_(x)), titanium dioxide (TiO₂), or magnesium fluoride (MgF_(x)). Thesecond insulating layer t700 includes a single layer or multiple layers.When the second insulating layer t700 includes multiple sub-layers, thesecond insulating layer t700 can be a distributed Bragg reflector (DBR)which includes a plurality pairs of sub-layers, and each sub-layer has arefractive index different from that of adjacent sub-layers.Specifically, the second insulating layer t700 can be formed byalternately stacking a SiO_(x) sub-layer and a TiO_(x) sub-layer. TheDBR provides a high reflectivity for particular wavelength or within aparticular wavelength range by setting the refractive index differencebetween each pair of the sub-layers with a high refractive index and alow refractive index respectively. The thicknesses of two sub-layers ineach pair can be different. The thicknesses of the sub-layers in eachpair with the same material can be the same or different.

Referring to FIGS. 29A-29C, FIG. 29A is a top view, and FIG. 29B andFIG. 29C are cross-sectional views taken along lines α-α′ and β-β′ shownin FIG. 29A. After forming the second insulating layer t700, a patternedmetal layer t200 is formed on the second semiconductor layer t102, thesecond insulating layer t700, and the reflective layer t310. As shown inFIGS. 29A-29C, the patterned metal layer t200 includes a first metalregion t200 a a second metal region t200 b, and a plurality of ring-likeopenings t2001. Each of the first metal region t200 a and the secondmetal region t200 b can be a continuous one or divided into a pluralityparts. In the embodiment, the first metal region t200 a is divided intoa group of sub-regions t200 a 1, t200 a 2, t200 a 3 by the ring-likeopenings t2001. The second metal region t200 b of the patterned metallayer t200 is continuously formed on the second semiconductor layert102, and fills in the plurality of first trenches t120 a and the secondtrench t120 b to cover the plurality of semiconductor constructionst1000. In a top view, the group of sub-regions t200 a 1, t200 a 2, t200a 3 includes a plurality of rectangular patterns surrounded by thesecond metal region t200 b. Since plurality of ring-like openings t2001surrounding the group of sub-regions t200 a 1, t200 a 2, t200 a 3respectively, the first metal region t200 a is electrically isolated tothe second metal region t200 b. In the embodiment, an outline of thepatterned metal layer t200 is approximately a rectangle. The group ofsub-regions t200 a 1, t200 a 2, t200 a 3 covers the exposed portion ofthe reflective layer t310 corresponding to the group of secondinsulating openings t7001 and electrically connects to the secondsemiconductor layer t102 through the reflective layer t310 and thetransparent conductive layer t300. Additionally, the second metal regiont200 b is continuously formed over the second insulating layer t700,formed and fills in the plurality of first trenches t120 a and thesecond trench t120 b, and covers the periphery side surface t1011S, theinclined side surface t1021S, and the surface t1012S of the firstsemiconductor layer t101, so as to contact the periphery side surfacet1011S and the surface t1012S of the first semiconductor layer t101.Accordingly, the second metal region t200 b electrically connects to thefirst semiconductor layer t101. Herein functions of the first metalregion t200 a and the second metal region t200 b are similar tofunctions of the contact structures of prior embodiments.

In one embodiment of the present application similar to the embodimentdescribed above, further referring to FIG. 24C, the second metal regiont200 b is continuously formed over the semiconductor stacks t100′ andother layers described above, and extends to fill in the plurality offirst trenches t120 a′ and the plurality of second trenches t120 b′. Thesecond metal region t200 b covers the periphery side surface t1011S, andthe inclined side surface t1021S, and discontinuously contacts thesurface t1012S of the first semiconductor layer t101 in the firsttrenches t120 a′ and the second trenches t120 b′, so as to electricallycontact the first semiconductor layer t101. Specifically, correspondingto the second metal region t200 b in the first trenches t120 a and thesecond trenches t120 b shown in FIG. 29A, the first trenches t120 a′ andthe second trenches t120 b′ are discontinuous, portions of the secondmetal region t200 b directly contact the surface t1012S of the firstsemiconductor layer t101 via the plurality of first trenches t120 a′ andthe plurality of second trenches t120 b′, and in a top view (not shown),a shape of the portions of the second metal region t200 b directlycontacting the surface t1012S of the first semiconductor layer t101corresponds to a shape composed by the plurality of first trenches t120a′ and the plurality of second trenches t120 b′. In another oneembodiment similar to the embodiment described above, further referringto FIG. 24D, the second metal region t200 b is continuously formed overthe semiconductor stacks t100″ and other layers described above, andextends to fills in the plurality of first trenches t120 a″ and theplurality of second trenches t120 b″. The second metal region t200 bcovers the periphery side surface t1011S, and the inclined side surfacet1021S, and discontinuously contacts the surface t1012S of the firstsemiconductor layer t101 in the first trenches t120 a′ and the secondtrenches t120 b′, so as to electrically contact the first semiconductorlayer t101. Corresponding to the second metal region t200 b in the firsttrenches t120 a and the second trenches t120 b shown in FIG. 29A, thefirst trenches t120 a′, and the second trenches t120 b″ arediscontinuous. Portions of the second metal region t200 b directlycontact the surface t1012S of the first semiconductor layer t101 via theplurality of first trenches t120 a″ and the plurality of second trenchest120 b″, and in a top view (not shown), a shape of the portions of thesecond metal region t200 b directly contacting the surface t1012S of thefirst semiconductor layer t101 corresponds to a shape composed by theplurality of first trenches t120 a″ and the plurality of second trenchest120 b″. Notably, the same reference numerals are used throughout thevarious embodiments to refer to the same or similar elements of anembodiment and redundant details thereof are omitted.

Referring to FIGS. 30A-30C, FIG. 30A is a top view and FIG. 30B and FIG.30C are cross-sectional views taken along lines α-α′ and β-β′ shown inFIG. 30A. After forming the patterned metal layer t200, a thirdinsulating layer t800 is formed to continuously cover the plurality ofsemiconductor constructions t1000, the inclined sidewalls t1021S of theplurality of semiconductor constructions t1000, and fills the pluralityof first trenches t120 a and the second trench t120 b. The thirdinsulating layer t800 includes a first insulating region t800 a, a firstgroup of third insulating openings t8001 and a second group of thirdinsulating openings t8002 in a top view wherein the first group of thirdinsulating openings t8001 includes one or more openings, and the secondgroup of third insulating openings t8002 includes one or more openings.The first group of third insulating openings t8001 exposes the group ofsub-regions t200 a 1, t200 a 2, t200 a 3 respectively, and the secondgroup of third insulating openings t8002 exposes the second metal regiont200 b respectively. A material of the third insulating layer t800 canbe a non-conductive material. Herein the non-conductive materialincludes organic materials, such as Sub, benzocyclobutene (BCB),perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymers (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polyimide (PI), polycarbonate (PC), polyetherimide,or fluorocarbon polymer, or inorganic materials, such as silicone,glass, aluminum oxide (Al₂O₃), silicon nitride (SiN_(x)), silicon oxide(SiO_(x)), titanium dioxide (TiO₂), or magnesium fluoride (MgF_(x)). Thethird insulating layer t800 includes a single layer or multiple layers.When the third insulating layer t800 includes multiple sub-layers, thethird insulating layer t800 can be a distributed Bragg reflector (DBR)which includes a plurality pairs of sub-layers, and each sub-layer has arefractive index different from that of adjacent sub-layers.Specifically, the third insulating layer t800 can be formed byalternately stacking a SiO_(x) sub-layer and a TiO_(x) sub-layer. TheDBR provides a high reflectivity for particular wavelength or within aparticular wavelength range by setting the refractive index differencebetween each pair of the sub-layers with a high refractive index and alow refractive index respectively. The thicknesses of two sub-layers ineach pair can be different. The thicknesses of the sub-layers in eachpair with the same material can be the same or different.

Referring to FIG. 31A, FIG. 31B, and FIG. 31C, FIG. 31A is a top view ofthe semiconductor light-emitting device T at the completion of thefabrication method in accordance with the embodiment of the presentapplication and FIG. 31B and FIG. 31C are cross-sectional views takenalong line α-α′ and β-β′ shown in FIG. 31A. The method of manufacturingthe semiconductor light-emitting device T further includes forming aplurality of first pad portions t400 and a plurality of second padportions t500 after forming the third insulating layer t800. Herein, theplurality of first pad portions t400 is formed on the third insulatinglayer t800 and contacts the first metal region t200 a including thegroup of sub-regions t200 a 1, t200 a 2, t200 a 3 of the patterned metallayer t200 respectively through the first group of third insulatingopenings t8001 so that the first pad portions t400 electrically connectsto the second semiconductor layer t102. Meanwhile, the plurality ofsecond pad portions t500 is formed on the third insulating layer t800and contacts the second metal region t200 b of the patterned metal layert200 through the second group of third insulating openings t8002 so thatthe second pad portions t500 electrically connects to the firstsemiconductor layer t101. Moreover, the plurality of first pad portionst400 is separated from the plurality of second pad portions t500.Additionally, the first pad portions t400 are separated from each other,disposed in a row and aligned with the second pad portions t500.

As shown in FIGS. 31A-31C, the semiconductor light-emitting device Tincludes the substrate t110, the semiconductor stack t100 formed on thesubstrate t110. The semiconductor stack t100 includes the firstsemiconductor layer t101 having the periphery side surface t1011S, thesecond semiconductor layer t102, and the active layer t103 formedbetween the first semiconductor layer t101 and the second semiconductorlayer t102. In an example of the embodiment, the substrate t110 can be agrowth substrate of the semiconductor stack t100, and a material of thesubstrate t110 includes a semiconductor material, such as galliumarsenide (GaAs), gallium phosphide (GaP), gallium nitride (GaN), siliconcarbide (SiC) or aluminum nitride (AlN), or an insulating material, suchas diamond, glass, quartz, or sapphire. In another example of theembodiment, the substrate t110 can be a support substrate, which isbonded to the semiconductor stack 100 through adhesive materialsincluding organic materials, such as Sub, benzocyclobutene (BCB),perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefincopolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer; or inorganic materials, such as silicone, glass, aluminum oxide(Al₂O₃), silicon nitride (SiN_(x)), silicon oxide (SiO₂), titanium oxide(TiO₂), or magnesium fluoride (MgF₂). The first semiconductor layer t101and the second semiconductor layer t102, such as cladding layers, orconfinement layers, include different conductivity types, electricity,polarity, or dopant elements to provide electrons and holes. The activelayer t103 is formed between the first semiconductor layer t101 and thesecond semiconductor layer t102, so the electrons and the holes combinein the active layer t103 under an electrical current to convertelectrical energy to optical energy for emitting a light. The dominantwavelength of the light is adjusted by changing physical and chemicalcompositions of one or more layers in the semiconductor stack t100. Thematerial of the semiconductor stack t100 includes group III-Vsemiconductor materials, such as Al_(x)In_(y)Ga_((1-x-y))N orAl_(x)In_(y)Ga_((1-x-y))P, wherein 0≤x, y≤1; (x+y)≤1. In accordance withthe material of the active layer t103, the semiconductor stack t100 canemit a red light with a dominant wavelength between such as 610 nm and650 nm, a green light with a dominant wavelength between such as 530 nmand 570 nm, a blue light with a dominant wavelength between such as 450nm and 490 nm, or a UV light with a dominant wavelength between such as230 nm and 400 nm. The active layer t103 includes single heterostructure(SH), double heterostructure (DH), double-side double heterostructure(DDH), or multi-quantum well (MQW) structure. The doping strategy of theactive layer t103 includes un-intentionally doping, p-type dopantdoping, or n-type dopant doping.

Parts of the active layer t103 and the second semiconductor layer t102are removed to form the plurality of first trenches t120 a, the secondtrench t120 b, and the plurality of semiconductor constructions t1000.The plurality of first trenches t120 a and the second trench t120 bpenetrate the semiconductor stack t100 to expose the surface t1012S ofthe first semiconductor layer t101. The second trench t120 b is disposednear the outmost edge of the semiconductor stack t100, and each of theplurality of first trenches t120 a is interposed between thesemiconductor constructions t1000. The plurality of first trenches t120a and the second trench t120 b surround the active layer t103 and thesecond semiconductor layer t102. Moreover, each of the plurality offirst trenches t120 a includes two ends, and at least one of the twoends connects to the second trench t120 b. Herein a width of one of theplurality of first trenches t120 a W₁ is greater than a width of thesecond trench t120 b W₂, for example, W₁=2W₂, the first trenches t120 aare parallel to each other, two ends of each of the first trenches t120a are connected to the second trench t120 b. In a top view, a shape ofone of the plurality first trenches t120 a includes a stripe, and ashape of the second trench t120 b includes a geometric shape, forexample, a ring-like shape, to surround the active layer t103, thenumber of the second trench t120 b is one, and the active layer t103 andthe second semiconductor layer t102 b are disposed in the second trencht120 b in a top view, but the application is not limited hereto.

The transparent conductive layer t300 is formed on the secondsemiconductor layer t102. The transparent conductive layer t300electrically connects to the semiconductor stack t100 when theelectrical current is injected. The material of the transparentconductive layer t300 includes transparent material which is transparentto the light emitted from the active layer t103. The structure of thetransparent conductive layer t300 can be one or more layers.

The first insulating layer t600 is formed to cover the periphery sidesurface t1011S of the first semiconductor layer t101 and the surfacet1012S of the first semiconductor layer t101 in the plurality of firsttrenches t120 a and the second trench t120 b and deposited on a inclinedwall t1021S of the semiconductor stack t100 to protect the epitaxialquality of the semiconductor stack t100 from being damaged by thefollowing process. The first insulating layer t600 is patterned bylithography technique to provide the first group of first insulatingregions t600 a corresponding to the plurality of first trenches t120 a,and the second group of first insulating regions t600 b corresponding tothe second trenches t120 b.

The reflective layer t310 is formed on the transparent conductive layert300 and aligned with transparent conductive layer t300 for increasingthe light extraction efficiency of the semiconductor light-emittingdevice T. Additionally, a barrier layer (not shown) can be form on andcover the reflective layer t310 so that the barrier layer can preventmigration, diffusion, or oxidation of the reflective layer t310. In anexample of the embodiment, the reflective layer t310 directly contactsthe transparent conductive layer t300. A sidewall of the barrier layercan be aligned with a sidewall of the reflective layer t310 or extend tooutside of a sidewall of the reflective layer t310. When the sidewall ofthe barrier layer is formed beyond the sidewall of the reflective layert310, the reflective layer 310 is covered by the barrier layer, and aportion of the barrier layer directly contacts the second semiconductorlayer t102 or the transparent conductive layer t300. The reflectivelayer t310 can include a single layer structure or a multi-layerstructure, and the material of the reflective layer t310 includes metalmaterial with high reflectivity, such as silver (Ag), gold (Au),aluminum (Al), titanium (Ti), chromium (Cr), copper (Cu), nickel (Ni),platinum (Pt), or an alloy thereof. The barrier layer can include asingle layer structure or a multi-layer structure, and the material ofthe barrier layer includes chromium (Cr), platinum (Pt), titanium (Ti),tungsten (W), or zinc (Zn). When the barrier layer is the multi-layerstructure, the barrier layer is alternately stacked by a first barrierlayer (not shown) and a second barrier layer (not shown), for example,Cr/Pt, Cr/Ti, Cr/TiW, Cr/W, Cr/Zn, Ti/Pt, Ti/W, Ti/TiW, Ti/W, Ti/Zn,Pt/TiW, Pt/W, Pt/Zn, TiW/W, TiW/Zn, or W/Zn.

The second insulating layer t700 is formed to cover a portion of thereflective layer t310 and the inclined sidewalls t1021S of the pluralityof semiconductor constructions t1000. The second insulating layer t700is patterned by lithography technique to expose the periphery sidesurface t1011S and the surface t1012S of the first semiconductor layert101 and provide a first group of second insulating openings t7001wherein the first group of second insulating openings t7001 of thesecond insulating layer t700 exposes a portion the reflective layert310.

The patterned metal layer t200 is formed on the second insulating layert700 and a portion of the reflective layer t310 and fills the pluralityof first trenches t120 a and the second trench t120 b to cover theplurality of semiconductor constructions t1000. The patterned metallayer t200 includes the first metal region t200 a, the second metalregion t200 b, and the plurality of ring-like openings t2001. The firstmetal region t200 a includes the group of sub-regions t200 a 1, t200 a2, t200 a 3. The plurality of ring-like openings t2001 surrounds thegroup of sub-regions t200 a 1, t200 a 2, t200 a 3 respectively. In theembodiment, the group of sub-regions t200 a 1, t200 a 2, t200 a 3electrically connects to the second semiconductor layer t102 through thereflective layer t310 and the transparent conductive layer t300.Additionally, the second metal region t200 b is continuously formed overthe second insulating layer t700, fills in the plurality of firsttrenches t120 a and the second trench t120 b and covers the peripheryside surface t1011S, so as to contact the periphery side surface t1011Sand the surface t1012S of the first semiconductor layer t101.Accordingly, the second metal region t200 b electrically connects to thefirst semiconductor layer t1011S. In another embodiment, similar toabove embodiments, the patterned metal layer t200 can extend to thesurface of the substrate t110 not covered by the first semiconductorlayer t101. The patterned metal layer t200 can be a single layerstructure or a multi-layer structure. The material of the patternedmetal layer t200 includes metal such as aluminum (Al), chromium (Cr),platinum (Pt), titanium (Ti), tungsten (W), or zinc (Zn).

A third insulating layer t800 is deposited on the semiconductor stackt100. The third insulating layer t800 is patterned by lithographytechnique to form the first insulating region t800 a, the first group ofthird insulating openings t8001 and the second group of third insulatingopenings t8002 on the semiconductor stack t100. The first group of thirdinsulating openings t8001 of the third insulating layer t800 exposes thepatterned metal layer t200. The first group of third insulating openingst8001 exposes several portions of the sub-regions t200 a 1, t200 a 2,t200 a 3. The second group of third insulating openings t8002 exposes aplurality of portions of the second metal region t200 b respectively. Inone embodiment, the first group of third insulating openings t8001 andthe second group of third insulating openings t8002 are formed on twosides of the semiconductor stack t100 from a top view of thesemiconductor light-emitting device T. In the embodiment, a number ofthe first group of third insulating openings t8001 is different fromthat of the second group of third insulating openings t8002.

The material of the first insulating layer t600, the second insulatinglayer t700, and the third insulating layer t800 includes non-conductivematerial which includes organic materials, such as Sub, benzocyclobutene(BCB), perfluorocyclobutane (PFCB), epoxy, acrylic resin, cyclic olefinpolymer (COC), polymethyl methacrylate (PMMA), polyethyleneterephthalate (PET), polycarbonate (PC), polyetherimide, or fluorocarbonpolymer, or inorganic materials, such as silicone, glass, aluminum oxide(Al₂O₃), silicon nitride (SiN_(x)), silicon oxide (SiO₂), titanium oxide(TiO₂), or magnesium fluoride (MgF₂). The first insulating layer t600,the second insulating layer t700, and the third insulating layer t800can be formed by printing, evaporation or sputtering.

The plurality of first pad portions t400 is formed on the secondsemiconductor layer t102 and the third insulating layer t800, andcontacts the first metal region t200 a including the group ofsub-regions t200 a 1, t200 a 2, t200 a 3 of the patterned metal layert200 respectively through the first group of third insulating openingst8001 so that the first pad portions t400 electrically connects thesecond semiconductor layer t102 through the group of sub-regions t200 a1, t200 a 2, t200 a 3. Meanwhile, the plurality of second pad portionst500 is formed on the second semiconductor layer t102 and the thirdinsulating layer t800, and contacts the second metal region t200 b ofthe patterned metal layer t200 through the second group of thirdinsulating openings t8002 so that the second pad portions t500electrically connects the first semiconductor layer t101. Notably, theplurality of first pad portions t400 or the plurality of second padportions t500 is devoid of directly contacting the portions of thepatterned metal layer t200 formed in the plurality of first trenchest120 a and the second trench t120 b. Moreover, a shape of the pluralityof first pad portions t400 includes a plurality of first rectangles, ashape of the plurality of second pad portions t500 includes a pluralityof rectangles, and the first pad portions t400 are separated from oneanother and also separated from the second pad portions t500.Additionally, the plurality of first pad portions t400 is disposed in arow, aligned with the second pad portions t500, and surrounded by theplurality of first trenches t120 a and the second trench t120 b. Asmentioned above, the plurality of first trenches t120 a and the secondtrench t120 b compose a plurality of rectangles, and in a top view, eachof the plurality of first pad portions t400 or each of the plurality ofsecond pad portions t500 is disposed in the rectangles respectively. Thematerial of the plurality of first pad portions t400 and the pluralityof second pad portions t500 includes metal, such as titanium (Ti),platinum (Pt), nickel (Ni), tin (Sn), or gold (Au), or an alloy thereof.An area of one of the plurality of first pad portions t400 can be thesame as or different from an area of one of the plurality of second padportions t500.

In the light-emitting device T of the application, the patterned metallayer t200 in the trenches t120 a and t120 b can spread currentuniformly. Accordingly, the reliability can be improved and the forwardvoltage can be decreased.

The principle and the efficiency of the present application illustratedby the embodiments above are not the limitation of the application. Anyperson having ordinary skill in the art can modify or change theaforementioned embodiments. Therefore, the protection range of therights in the application will be listed as the following claims.

What is claimed is:
 1. A semiconductor light-emitting device,comprising: a substrate; a semiconductor stack comprising a firstsemiconductor layer, a second semiconductor layer, and an active layerbetween the first semiconductor layer and the second semiconductor layerformed on the substrate, wherein the first semiconductor layer comprisesa first exposed portion and a second exposed portion which are notcovered by the active layer and the second semiconductor layer; aplurality of first trenches formed on the substrate and comprising asurface composed by the first exposed portion of the first semiconductorlayer; a second trench formed on the substrate and comprising a surfacecomposed by the second exposed portion of the first semiconductor layerat a periphery region of the semiconductor light-emitting device,wherein each of the plurality of first trenches is branched from thesecond trench; a first insulating layer covering a periphery sidesurface of the semiconductor stack; a reflective layer formed on thesecond semiconductor layer; a patterned metal layer formed on the secondsemiconductor layer, wherein the patterned metal layer comprises a firstmetal region and a second metal region, and portions of the second metalregion are formed in the plurality of first trenches and the secondtrench to electrically connect to the first exposed portion of the firstsemiconductor layer and the second exposed portion of the firstsemiconductor layer; and a second insulating layer formed on thesemiconductor stack and between the second metal region and the secondsemiconductor layer, wherein the second insulating layer comprises asecond insulating opening exposing the reflective layer.
 2. Thesemiconductor light-emitting device of claim 1, wherein the plurality offirst trenches comprises a stripe shape.
 3. The semiconductorlight-emitting device of claim 1, wherein the plurality of firsttrenches is parallel to one another in a top view of the semiconductorlight-emitting device.
 4. The semiconductor light-emitting device ofclaim 1, wherein each of the plurality of first trenches comprises anend connected to the second trench and another end not connected to thesecond trench.
 5. The semiconductor light-emitting device of claim 1,wherein the second trench comprises a plurality of parts separated fromeach other.
 6. The semiconductor light-emitting device of claim 5,wherein the plurality of parts composes a rectangular dashed ring. 7.The semiconductor light-emitting device of claim 1, wherein thereflective layer comprises Ag or Al.
 8. The semiconductor light-emittingdevice of claim 1, further comprising a barrier layer formed on thereflective layer.
 9. The semiconductor light-emitting device of claim 1,further comprising a transparent conductive layer formed between thesecond semiconductor layer and the reflective layer.
 10. Thesemiconductor light-emitting device of claim 9, wherein the transparentconductive layer comprises indium tin oxide (ITO) or indium zinc oxide(IZO).
 11. The semiconductor light-emitting device of claim 1, furthercomprising a third insulating layer formed on the patterned metal layer,wherein the third insulating layer comprises a plurality of thirdinsulating openings exposing the first metal region and the second metalregion respectively.
 12. The semiconductor light-emitting device ofclaim 11, wherein the third insulating layer comprises a distributedBragg reflector (DBR).
 13. The semiconductor light-emitting device ofclaim 1, wherein the second insulating layer comprises a distributedBragg reflector (DBR) which includes a plurality pairs of sub-layers,and each sub-layer has a refractive index different from that ofadjacent sub-layers.
 14. The semiconductor light-emitting device ofclaim 1, wherein the substrate comprises sapphire.
 15. The semiconductorlight-emitting device of claim 1, wherein the first metal regioncomprises a plurality of parts spatially separated on semiconductorstack.
 16. The semiconductor light-emitting device of claim 15, whereinthe plurality of parts of the first metal region is surrounded by thesecond metal region.
 17. The semiconductor light-emitting device ofclaim 1, wherein the second trench comprises a rectangular ring shape,and the plurality of first trenches is surrounding by the second trench.